Chinese Journal of Lasers, Volume. 44, Issue 3, 303002(2017)

Development of Heat Radiation Filter Film for Ultraviolet Curing System

Fu Xiuhua1、*, Fan Jiachen1, Zhang Jing1, Xiong Shifu1, Chen Zhihang1, and Yang Yongliang2
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  • 1[in Chinese]
  • 2[in Chinese]
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    In order to reduce the heat radiation of ultraviolet (UV) curing system, based on the optical thin-film theory, with HfO2, AlF3 and Cr as coating materials, and by use of the reflection and absorption combined structure, the filter film system with high reflection in the UV band and high absorption in visible-near infrared band is designed. The soundness of the thin film is improved by coating Al film as the transition layer between the substrate and the film system. After the optimization of process parameters, the filter film with average reflectivity of 90.6% in 220-400 nm wave band and average absorptivity of 92.4% in 420-2000 nm wave band is developed.

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    Fu Xiuhua, Fan Jiachen, Zhang Jing, Xiong Shifu, Chen Zhihang, Yang Yongliang. Development of Heat Radiation Filter Film for Ultraviolet Curing System[J]. Chinese Journal of Lasers, 2017, 44(3): 303002

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    Paper Information

    Category: materials and thin films

    Received: Nov. 8, 2016

    Accepted: --

    Published Online: Mar. 8, 2017

    The Author Email: Xiuhua Fu (goptics@126.com)

    DOI:10.3788/cjl201744.0303002

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