Chinese Journal of Lasers, Volume. 26, Issue 3, 197(1999)

An Investigation of the KrF Excimer Emission spectrum without an Additional Fluorine Donor

[in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    Without an additional fluorine donor, the Kr/Ne mixture was excited in an excimer laser with teflon surface preionization plates. The relative UV spectrum was analyzed by ways of spectrography and opto electric scanning. The formation of KrF excimer was affirmed. The relations of emission spectrum with parameters were studied.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Investigation of the KrF Excimer Emission spectrum without an Additional Fluorine Donor[J]. Chinese Journal of Lasers, 1999, 26(3): 197

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    Paper Information

    Category: Laser physics

    Received: Oct. 27, 1997

    Accepted: --

    Published Online: Aug. 9, 2006

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