Journal of Synthetic Crystals, Volume. 52, Issue 3, 493(2023)

Numerical Simulation of Stress Intensity Factor for Pore-Crack in Quartz Crucible under High Temperature Cyclic Loading

ZHAO Guoyan1, QU Li2, LI Jin1,2、*, and MA Run1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    The inner wall of the quartz crucible for continuous Czocharlski will form more bubbles with the increase of Czocharlski times, and it is easy to generate dislocations in the crystal and the erosive silicon melt, which will cause the crucible to dissolve and corrode over time. In order to study the effect of the interaction of erosive silicon melt with bubbles on the crucible, in situ observations of the performance of quartz crucibles are expected. However, the extremely high temperature environment inside single crystal furnaces makes it difficult to investigate their interiors experimentally. In this paper, the pore-crack on the inner surface of the quartz crucible are taken as the research object, and the finite element simulation is used to obtain the stress intensity factor values of different pore shapes, crack shapes and crack inclination angles of the quartz crucible under high temperature cyclic loading at different Czocharlski stages. The results show that with the increase of the crack inclination angle, the KΙ value shows a trend of gradually decreasing, the KⅢ value shows a trend of first increasing and then decreasing, and the KⅢ value is symmetrical distributed along 45°; furthermore, with the increase of the pore depth/diameter ratio, KΙ value shows a decreasing trend, and the rate of reduction when the depth/diameter ratio is equal to 1 as the boundary has a significant increase, KⅢ is much smaller than KΙ value, indicating that the dominant form of cracking is type Ⅰ; the crack shape ratio has a significant impact on the value of KΙ or KⅢ, and the smaller the shape ratio, the greater the value of the stress intensity factor at the crack tip; when the inclination angle is 0°, the total stress intensity factor K value is the largest, which will make the crack most likely to expand and the most harmful to the quartz crucible. Finally, in the case of continuous Czocharlski, the total stress intensity factor of the crown growth process is always greater than that of the equal diameter growth, cone and cooling growth process. Simulation results bring certain theoretical guiding significance for production.

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    ZHAO Guoyan, QU Li, LI Jin, MA Run. Numerical Simulation of Stress Intensity Factor for Pore-Crack in Quartz Crucible under High Temperature Cyclic Loading[J]. Journal of Synthetic Crystals, 2023, 52(3): 493

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    Paper Information

    Category:

    Received: Nov. 9, 2022

    Accepted: --

    Published Online: Apr. 13, 2023

    The Author Email: Jin LI (li-jin@163.com)

    DOI:

    CSTR:32186.14.

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