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Chinese Journal of Lasers, Volume. 34, Issue 8, 1130(2007)

Novel Method for Measuring Non-Orthogonality of Interferometer System in Step and Scan Lithographic Tool

[in Chinese]1,2、*, [in Chinese]1, [in Chinese]1,2, [in Chinese]1, and [in Chinese]1,2
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    Article index updated: Mar. 11, 2025

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Novel Method for Measuring Non-Orthogonality of Interferometer System in Step and Scan Lithographic Tool[J]. Chinese Journal of Lasers, 2007, 34(8): 1130

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    Paper Information

    Category: measurement and metrology

    Received: Nov. 2, 2006

    Accepted: --

    Published Online: Sep. 5, 2007

    The Author Email: (hele0511@siom.ac.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology