Infrared Technology, Volume. 44, Issue 9, 964(2022)

An Infrared Micro Scanner Measurement and Calibration Method Based on Image Processing

Guiquan WANG*, Zhiwen XU, Yongjin DUAN, Haokun SHI, Xuke JIANG, Yansheng LI, Yuxuan ZHANG, and Jie ZHANG
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    In infrared imaging systems, in which the core is an infrared focal plane array, a microscanner can enhance the spatial resolution of the entire system. To test microscanners, this study developed a measurement and calibration method based on image processing and built a system to measure and calibrate microscanners. Using a microscanner as a test subject, the test results indicate that the proposed method has a significant effect on the measurement accuracy, repetition accuracy, and uncertainty. The method can provide technical support for the design and manufacture of microscanners.

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    WANG Guiquan, XU Zhiwen, DUAN Yongjin, SHI Haokun, JIANG Xuke, LI Yansheng, ZHANG Yuxuan, ZHANG Jie. An Infrared Micro Scanner Measurement and Calibration Method Based on Image Processing[J]. Infrared Technology, 2022, 44(9): 964

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    Paper Information

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    Received: Nov. 19, 2021

    Accepted: --

    Published Online: Oct. 29, 2022

    The Author Email: Guiquan WANG (119455225@qq.com)

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