The micro-particle manipulation technology, with its precise control, low cost, simplicity and high efficiency, has broad application prospects in biomedical engineering and micro-nano device manufacturing. The traditional control methods have shortcomings in the control of non-magnetic, non-conductive and high-density solid micro-particles. Therefore, this paper proposes a micro-particle manipulation system based on the low-frequency vibration of piezoelectric cantilever beam, which uses the flow at the bottom of the flow field to realize the aggregation of micro-particles. The aggregation microscopic test shows that the spherical alumina particles at the bottom of the culture dish move and aggregate towards the target region due to the bottom flow field excited by low-frequency vibration of piezoelectric vibrator, and reach a stable state at 122 s. The image processing of test results show that the aggregation area of the micro-particles is up to 79 405 μm2. The proposed manipulation method can realize the aggregation of high-density micro-particles and the aggregation range is large, which can provide a technical reference for the manufacturing of micro-nano devices.