Chinese Journal of Lasers, Volume. 47, Issue 12, 1201005(2020)
Design and Fabrication of Polarizer Based on All-Dielectric Resonance-Domain Grating
Based on the characteristics of resonance-domain grating, a high performance polarizer for near-infrared communication band is designed and fabricated using commercial silicon-on-insulator(SOI). In the wavelength range of 1.460μm to 1.625μm, an all-dielectric resonance-domain grating with a period of 0.98μm is designed by use of finite difference time domain method. The maximum extinction ratio of the grating is up to 55dB. According to the results of the design, the polarization grating is experimentally fabricated by electron beam lithography and the polarization performance of grating is measured. Experimental results show that the transmission of transverse magnetic polarized light of grating exceeds 80%, the extinction ratio of the polarization grating is more than 20dB, and the maximum value can reach up to 32dB, agreeing well with the simulation results. Compared with the polarization characteristics of the traditional sub-wavelength metal grating whose period requires less than a quarter of the incident light wavelength, the polarization grating exhibits good polarization performance with near wavelength grating period, reducing the difficulty of lithography in fabrication. Moreover, the polarizer is fabricated based on commercial SOI, which is compatible with the existing mature semiconductor technology and has strong integration and practicability.
Get Citation
Copy Citation Text
Wei Zhangfan, Hu Jingpei, Zhang Chong, Dong Yangeng, Zeng Aijun, Huang Huijie. Design and Fabrication of Polarizer Based on All-Dielectric Resonance-Domain Grating[J]. Chinese Journal of Lasers, 2020, 47(12): 1201005
Category: laser devices and laser physics
Received: Jul. 2, 2020
Accepted: --
Published Online: Nov. 17, 2020
The Author Email: