Micro-scale laser shot peening (μLSP) is proposed as a new technology using shock wave pressure generated by the interaction between micro-scale laser beam and material to implement surface treatment, which can be adapted to macro and micro surface treatment of metal components. Process parameters controlling and a reasonable path planning are beneficial to generate useful residual stress distribution and regular geometric morphology, which can significantly change the material wear resistance and improve the anti-fatigue property as well as corrosion resistance. Based on the introduction of principles and characteristics of μLSP technology, the key scientific problems in μLSP process are analyzed, the research progress of shock wave pressure model, related experiments, numerical simulation and surface modification are described, the current existed problems are discussed, and applicative prospect as well as technology development of μLSP is also looked forward.