The laser edge cleaning process in the preparation process of a-Si∶H thin film solar cell was experimentally studied by using a 1 064 nm MOPA fiber laser. The effects of process parameters such as laser pulse width, filling line spacing, scanning speed and others on the processing results were discussed. Under the parameters of pulse width 100 ns, repetition frequency 80 kHz, filling line spacing 35 μm, output power ratio 100%, scanning speed 3 500 mm/s, spot overlap ratio wx＝0.83, wy＝0.88, a good edge cleaning effect was obtained on the surface of the clear-edged area with a resistance ＞1 000 MΩ.