Chinese Journal of Lasers, Volume. 31, Issue 2, 210(2004)

Change of PZT Thin Films Ferroelectric Properties Induced by Laser Beam Thermal Shock

[in Chinese]*, [in Chinese], and [in Chinese]
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    The high energy pulse laser was used to radiate lead zirconate titanate (PZT) piezoelectric films. The effect of the laser thermal shock on the properties of the films was investigated. It was found that when the laser energy density was lower than the damage threshold of the films, the ferroelectric properties of PZT thin films changed after laser thermal shock. The remnant polarization value decreased from 32 699 μC/cm 2 to 26 316 μC/cm 2, the coercive field was basically constant at 38 396 kV/cm, and the fatigue property of the films became more stabilized, the Pr degradation ratio is from 44.3% to 34.7% at the cycles of 1.75×109 when the laser energy density was from zero to 19.89 J/cm2. Moreover, the micro-mechanism was discussed based on the experimental phenomena.

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    [in Chinese], [in Chinese], [in Chinese]. Change of PZT Thin Films Ferroelectric Properties Induced by Laser Beam Thermal Shock[J]. Chinese Journal of Lasers, 2004, 31(2): 210

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    Paper Information

    Category: laser devices and laser physics

    Received: Sep. 5, 2002

    Accepted: --

    Published Online: Jun. 12, 2006

    The Author Email: (yanzhik@163.net)

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