Chinese Optics Letters, Volume. 10, Issue s2, S21407(2012)
Novel optical f iber-based laser direct writing process for micromachining of metal
A laser micromachining technique for the fabrication of metallic microstructures is proposed. The fabrication of microstructures is done by laser-induced wet etching that adopts an optical fiber as a machining tool. The laser beam delivered through the multimode fiber directly irradiates on the workpiece while maintaining a proper gap to avoid fiber damage. The manufacture of microstructures with high surface quality and good size uniformity is realized. Microgrooves with aspect ratio over 10 and microholes with a nearly straight cross-section can be produced by the proposed technique. The overall etching results are examined closely with respect to process variables.
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Kwang H. Oh, S. S. Woo, H. S. Jeong, Y. W. Yi, S. H. Jeong, "Novel optical f iber-based laser direct writing process for micromachining of metal," Chin. Opt. Lett. 10, S21407 (2012)
Category: Lasers and Laser Optics
Received: Mar. 20, 2012
Accepted: Aug. 13, 2012
Published Online: Dec. 6, 2012
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