Chinese Optics, Volume. 17, Issue 3, 521(2024)

High-precision spherical wavefront calibration method for shack-hartmann wavefront sensor

Ming-di BAO1, Guo-hua SHI1,2、*, Li-na XING1,2, and Yi HE1,2、*
Author Affiliations
  • 1School of Biomedical Engineering (Suzhou), University of Science and Technology of China, Suzhou 215163, China
  • 2Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou 215163, China
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    To address the issues of low measurement accuracy and insufficient stability in traditional calibration methods for Shack-Hartmann wavefront sensors (SHWFS), we propose a high-precision absolute calibration method using spherical waves generated by sensor. A high-precision calibration method for spherical waves was obtained through theoretical derivation. Combined with the constructed spherical wave calibration experimental device, high-precision calibration was performed on the SHWFS with sub apertures of 128×128. The structural parameters of the SHWFS (f, w, and L0) are calculated precisely. The measurement accuracy of the SHWFS is verified after calibration. The experimental results demonstrate that by using this method to calibrate the SHWFS, its wavefront recovery accuracy reaches a PV of 1.376×10-2λ and an RMS of 4×10-3λ (where λ=625 nm), respectively. Additionally, its repeatability accuracy reaches a PV of 3.2×10-3λ and an RMS of 9.76×10-4λ (where λ=625 nm), respectively. These findings suggest that this method is suitable for enhancing the measurement accuracy of high-precision calibration of SHWFS with large aperture.

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    Ming-di BAO, Guo-hua SHI, Li-na XING, Yi HE. High-precision spherical wavefront calibration method for shack-hartmann wavefront sensor[J]. Chinese Optics, 2024, 17(3): 521

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    Paper Information

    Category: Original Article

    Received: Aug. 28, 2023

    Accepted: --

    Published Online: Jul. 31, 2024

    The Author Email:

    DOI:10.37188/CO.2023-0148

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