Laser Technology, Volume. 45, Issue 1, 109(2021)

Research on the characteristics of laser produced tin plasma by using Langmuir probe

SUN Qin1, TIAN Leichao2, WU Yaoxing1, YIN Peiqi1, WANG Junwu1、*, WANG Xinbing1, and ZUO Duluo1
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  • 1[in Chinese]
  • 2[in Chinese]
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    The extreme ultraviolet (EUV) light conversion efficiency of the laser-produced tin plasma is closely related to the plasma characteristics. To diagnose the parameters of tin plasma, a Langmuir probe for laser-produced plasma diagnosis was designed. And the time evolution of electron temperature and electron density of tin plasma produced by different laser energies were studied. The results show that the peak electron density of the plasma is about 4.5×1011cm-3 with laser energy of 58.1mJ, and the maximum electron temperature is 16.5eV, which decreased with the reduction of laser energy. Moreover, the evolution trends of electron temperature measured by Langmuir probe and emission spectrometry are consistent. This study provides a new simple and rapid diagnostic method for laser-produced plasma EUV light source, which is beneficial to optimize the parameters of EUV light.

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    SUN Qin, TIAN Leichao, WU Yaoxing, YIN Peiqi, WANG Junwu, WANG Xinbing, ZUO Duluo. Research on the characteristics of laser produced tin plasma by using Langmuir probe[J]. Laser Technology, 2021, 45(1): 109

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    Paper Information

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    Received: Dec. 2, 2019

    Accepted: --

    Published Online: Aug. 22, 2021

    The Author Email: WANG Junwu (xbwang@hust.edu.cn)

    DOI:10.7510/jgjs.issn.1001-3806.2021.01.019

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