Chinese Journal of Liquid Crystals and Displays, Volume. 34, Issue 12, 1166(2019)

Research and improvement of TFT white color uniformity based on SiNx film

CAO Bin-bin*, YE Cheng-zhi, AN Hui, MA Li, LIU Guang-dong, LYU Yan-ming, PENG Jun-lin, YANG Zeng-qian, LI Fang-fang, LU Xiang-wan, HUANG Zheng-feng, LIU Zeng-li, LIAO Wei-jing, and LI Heng-bin
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    TFT White Color Uniformity (WCU) and SiNx film thickness of each layer were tested based on the same test points and the correlation between them is analyzed. It is found that TFT WCU has a great correlation with GI and PVX2 layers rather than PVX1 layer with the thinnest THK and largest n value. On this basis, an improvement scheme to reduce the center value of GI Remain THK(to avoid the residue of GL layer) and PVX2 THK (to improve the uniformity in panel)at the same time is proposed, which can reduces the mean value of TFT WCU by about 0.000 7. After improvement, the maximum value can be decreased from 0.007 0 to 0.005 2 to satisfy the specification(maximum value ≤ 0.005 5). The effect of improvement is obvious.

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    CAO Bin-bin, YE Cheng-zhi, AN Hui, MA Li, LIU Guang-dong, LYU Yan-ming, PENG Jun-lin, YANG Zeng-qian, LI Fang-fang, LU Xiang-wan, HUANG Zheng-feng, LIU Zeng-li, LIAO Wei-jing, LI Heng-bin. Research and improvement of TFT white color uniformity based on SiNx film[J]. Chinese Journal of Liquid Crystals and Displays, 2019, 34(12): 1166

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    Paper Information

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    Received: May. 30, 2019

    Accepted: --

    Published Online: Jan. 9, 2020

    The Author Email: CAO Bin-bin (caobinbin@boe.com.cn)

    DOI:10.3788/yjyxs20193412.1166

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