Advancing renewable energy technologies is essential for addressing the dual challenges of climate change and energy sustainability.1
Advanced Photonics, Volume. 7, Issue 3, 034004(2025)
Black silicon nanostructures for solar energy conversion and photonic applications: a review
The rapid advancement of renewable energy technologies is essential for combating global climate change and achieving energy sustainability. Among the various renewable sources, solar energy stands out, with silicon playing a pivotal role in solar energy conversion. However, traditional silicon-based devices often face challenges due to high surface reflectance, which limits their efficiency. The emergence of black silicon (b-Si) offers a transformative solution, thanks to its micro- and nanoscale structures that provide ultra-low reflectivity and enhanced light absorption. This makes b-Si an ideal candidate for improving solar energy devices. Beyond solar energy applications, b-Si has drawn notable interest in photonics, including applications in photodetectors, surface-enhanced Raman scattering, and imaging. This review explores b-Si comprehensively, discussing its fabrication processes, distinctive properties, and contributions to both solar energy conversion and photonic technologies. Key topics include its roles in solar cells, photoelectrochemical systems, solar thermal energy conversion, and advanced photonic devices. Furthermore, the review addresses the challenges and future directions for optimizing b-Si to facilitate its practical deployment across a range of energy and photonic applications.
1 Introduction
Advancing renewable energy technologies is essential for addressing the dual challenges of climate change and energy sustainability.1
Black silicon (b-Si) is a unique silicon material characterized by its micro- and nanoscale structures, which have developed rapidly in recent years.18
Although several prior review articles have examined individual nanostructures of b-Si,45,46 and specific applications such as solar cells,19,30 or photodetectors,22 they often overlook the diverse nanostructures of b-Si, including holes, pyramids, and pillars, as well as comprehensive applications in solar energy conversion (such as, solar to electricity, chemical and thermal energy) and photonics devices (such as photodetector, SERS, imaging). This review aims to offer a comprehensive and up-to-date exploration of nanostructured b-Si and its applications in solar conversion and photonic applications (Fig. 1). First, it will discuss the various fabrication techniques and unique properties of b-Si, which helps to understand the underlying mechanisms responsible for its optical characteristics. Next, the recent advancements in integrating b-Si into solar energy conversion and high-performance photonics devices will be elaborated across four key areas: (i) solar cells, (ii) photoelectrochemical solar energy conversion, (iii) solar thermal energy conversion, and (iv) photonics-related applications, including photodetectors, SERS, and imaging applications. Finally, the challenges and future perspectives in the continued development and optimization of b-Si for practical applications will be explored.
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Figure 1.Illustrative overview of the topics covered in this review on black silicon (b-Si) nanostructures for solar energy conversion and photonic applications.
2 Nanostructured Black Silicon (b-Si) Properties and Fabrication Techniques
2.1 Unique Properties of b-Si
B-Si exhibits unique properties that make it highly suitable for solar energy conversion and photonic applications, distinguishing it from bulk silicon. In solar cells with thick wafers, optical management focuses on minimizing front-surface reflection by applying anti-reflection (AR) coatings and creating textured surfaces. The textured surface not only reduces reflection but also acts to trap photons, enhancing light capture and absorption, particularly at longer wavelengths.20
As is shown in Fig. 2(a), b-Si significantly reduces reflectance through various mechanisms, which are influenced by the dimensions and geometry of its nanoscale surface features. First, multiple light interactions with the textured surface decrease reflection. Second, when the features are considerably larger compared with the wavelength of sunlight, surface scattering extends the light path, increasing absorption. Third, extremely small texture features create a gradual refractive index transition between air and silicon, facilitated by the nanostructured surfaces, as illustrated in Fig. 2(b).48 In this graded-index AR effect, the porous layer of b-Si acts as a medium with a reduced refractive index. With uniform porosity, the b-Si layer presents a refractive index that is intermediate between that of air and bulk silicon, leading to a step change at the interfaces as illustrated in Fig. 2(b-ii). A porosity gradient in Fig. 2(b-iii) further smoothens the refractive index transition, reducing reflectance even more effectively. The greatest reduction occurs when the b-Si layer thickness increases and the nanostructure size decreases [Fig. 2(b-iv)]. As illustrated in Figs. 2(c) and 2(d), the nano-textured surface comprises sub-wavelength structures with two rough interfaces: one at the transition between air and the nanostructured (nT) layer (top), and the other between the nT and bulk silicon (bottom). These subwavelength structures, combined with boundary roughness, enable the nT layer to act as a transitional medium where the refractive index smoothly changes between air and silicon. As incident light is reflected at various depths within the nT layer, destructive interference reduces reflection losses across a broad wavelength range.50 Moreover, the bandgap of b-Si can be modified through doping with specific impurities, which may make it optically ideal for advanced photonic devices. Figure 2(e) illustrates the development of enhanced b-Si absorption across broad spectral ranges (from visible-NIR26,52,53 to MIR regions51,54,55) through optimizing the etching and doping parameters. Remarkably, by combining heavy phosphorus doping with a high-aspect-ratio nanostructure, b-Si can function as a broadband perfect absorber with exceptional spectral coverage extending to
Figure 2.(a) Light interaction mechanisms within nanostructured surfaces. (b) Four basic spatial refractive index profiles of thickness
In addition, numerical modeling has emerged as a critical tool for both understanding the fundamental properties of b-Si and optimizing its nanostructures for photonic applications.30,56
Furthermore, due to its relatively low mechanical strength, b-Si facilitates the separation of ultra-thin wafers from silicon ingots. The large surface area and high activity of b-Si enhance its ability to act as a getter, effectively reducing impurities within the wafer.20
2.2 Fabrication Methods of b-Si
Over the past several decades, a variety of manufacturing techniques for b-Si have been developed and tested, including electrochemical etching, stain etching, MACE, RIE, and laser processing (Fig. 3). Each of these etching methods produces unique micro- and nanostructures, resulting in distinct optical and electrical properties.
Figure 3.Schematic of b-Si fabrication methods: (a) electrochemical etching for macroporous silicon production, (b) stain etching process, (c) metal-assisted chemical etching (MACE) process, (d) reactive ion etching (RIE) process, (e) laser treatment process. Panels (a), (c), (d), and (e) are reproduced with permission,19 © 2014 John Wiley and Sons. The definitions of abbreviated characters (e.g.,
2.2.1 Electrochemical etching
The electrochemical etching process utilizes silicon as the anode in a solution mainly containing hydrofluoric acid (HF). By fine-tuning parameters such as current density, HF concentration, etching duration, and illumination, this method enables precise control over the morphology of b-Si. Originally introduced by Memming and Schwandt,61 this technique gained prominence following the discovery of the luminescence phenomenon in porous silicon, signifying the advent of a novel silicon-based nanomaterial. As illustrated in Fig. 4(a), a silicon wafer (either n-type or p-type) is attached to the anode of an electrochemical cell and immersed in a mixture of HF, water, and ethanol.20 HF is essential for dissolving the silicon oxides produced during the etching, forming complexes that are soluble in water. Meanwhile, water participates in the oxidation reactions and helps regulate HF concentration to control reaction rates. Ethanol reduces silicon’s surface tension, improving wettability, facilitating the release of hydrogen (
Figure 4.(a) Typical experimental configurations for electrochemical HF etching of p-Si (left) and
During the process, charge transfer occurs between the silicon and the electrolyte until equilibrium is reached, aligning the silicon’s Fermi level (
Using photolithographically defined masks, selective polishing of regions can be achieved through electrochemical etching, enabling the fabrication of three-dimensional micro- and nanostructures.65
2.2.2 Stain etching
Stain etching usually utilizes a mixture of HF and
Figure 5.(a) Stain etching process. Reproduced with permission,69 © 2023 Ishik University. (b) Reflectance spectra of stain-etched porous silicon on an mc-Si wafer. Reproduced with permission,70 © 2017 IOP Publishing; reproduced with permission,20 © 2014 Royal Society of Chemistry. (c)–(e) SEM images of Si micropillars obtained by the stain etching under different conditions, showing various shapes: (c) Si tubes incorporating a homogeneous porous silicon layer etched from the BHNO solution; (d) Si tubes covered with porous silicon after etching in an HVO solution; and (e) Si micro-cones covered with porous silicon. Scale bar:
In addition, the silicon surface morphology can be tailored by adjusting the HF-to-
It is worth noting that stain etching rapidly removes the silicon surface, creating a gradual transition from solid silicon to full porosity.72 However, this method has a limit on the maximum thickness of the porous layer20 and may also lead to fluoride wastewater and
2.2.3 Metal-assisted chemical etching
MACE is a widely employed technique for fabricating b-Si with high aspect ratios and tunable dimensions and morphologies.62,73 In this approach, a metal catalyst layer is applied to a silicon substrate, guiding the etching process when exposed to HF and an oxidizing agent. The metal catalyst, commonly gold (Au),74
Figure 6.(a) Schematic of the metal-assisted chemical etching (MACE) process. (b) Energy band diagrams (top) of the Au/Si interface and the corresponding MACE morphology schematic (bottom) for n- and p-type silicon. (c) SEM images of the experimental MACE morphologies for various n- and p-Si electrodes. (a)–(c) Reproduced with permission,85 © 2016 American Chemical Society. (d) Top-view SEM image of commercially boron-doped (1 to 3 Ω cm), (100) oriented c-Si wafers etched for 15 min at 50°C in a 5 mmol/L
In the MACE process, silicon oxide forms beneath metal particles and is etched away by HF, allowing the metal to penetrate into the silicon and develop a porous structure, in which the pore depth is controlled by the etching duration. After achieving the desired structure, the metal nanoparticles are dissolved with an etchant such as
To conclude, MACE is a simple, fast, cost-effective, and adaptable technique for producing various nanostructures, requiring only basic equipment. Wet etching methods using Ag and Cu catalysts are especially promising for the affordable and large-scale production of b-Si in commercial silicon photovoltaic (PV) applications.88 The resulting surface morphology of b-Si depends on factors such as the type, size, shape, and coverage of metal nanoparticles, as well as the etching time, etchant composition, and temperature.88
2.2.4 Reactive ion etching
RIE is a dry etching technique characterized by its high anisotropy and excellent selectivity, achieved through ion-induced chemical reactions [Fig. 7(a)].91 First introduced by Gittleman et al. at RCA Laboratories in 1979, RIE was used to create non-reflective b-Si surfaces for applications such as solar thermal energy conversion.94 In 1995, Jansen et al. demonstrated the application of RIE to produce grass-like b-Si surfaces.95 As illustrated in Fig. 7(b), this approach uses
Figure 7.(a) Schematic illustrating the fabrication of b-Si via plasma-assisted reactive ion etching (RIE) with inductively coupled plasma (ICP). (b) Process diagram showing alternating etching and deposition steps to create high-aspect-ratio features on Si wafers. (a) and (b) Reproduced with permission,91 © 2017 Royal Society of Chemistry. (c) Schematic representation of RIE-induced damage on a silicon substrate. Reproduced with permission,92 © 1999 American Vacuum Society; reproduced with permission,20 © 2014 Royal Society of Chemistry. (d) Tilted top-view and (e) cross-sectional SEM images of SiNTs with a length of 1600 nm. (f) Absorption spectra comparison of SiNTs (filled squares) and crystalline silicon (solid line) across the UV-vis-NIR range. (d)–(f) Reproduced with permission,93 © 2007 Springer Nature.
The morphology of b-Si fabricated through RIE can be controlled by adjusting factors such as gas composition, flow rate, system temperature, substrate bias, and RF power. A higher
2.2.5 Laser treatment
Femtosecond laser processing offers a flexible method for texturing the surface of silicon substrates.96
Figure 8.(a) Illustration of the setup for producing b-Si with femtosecond laser pulses. The inset on the left depicts the vacuum chamber designed for placing the silicon samples. Reproduced with permission,99 © 2016 IEEE. (b) SEM images of sharp conical spikes generated on Si (100) by 500 fs laser pulses (100 fs duration), viewed at 45 deg to the surface normal (top) and parallel to the surface (bottom). Reproduced with permission,100 © 1998 AIP Publishing. (c) SEM image of the microgroove structures; inset is a photograph of the b-Si sample. (d) 3D optical image of microgroove structure with nano-textured patterns. (e) The reflectance spectrum of the b-Si fabricated through femtosecond laser ablation in an air environment. (c)–(e) Reproduced with permission,101 © 2011 Elsevier.
In addition, prior studies demonstrate that laser treatment in water or oil can generate much finer structures, reaching sub-100 nm—up to 100 times smaller compared with those formed in gas environments or vacuum conditions.103,104 In addition, combining laser irradiation with a periodic mask allows for the formation of well-defined, regularly spaced structures on silicon wafers. Unlike many techniques, laser processing is not limited by grain orientation, making it suitable for both crystalline silicon (c-Si) and mc-Si.20 B-Si produced through laser treatment, especially with sulfur doping, has demonstrated versatility across a wide range of applications.
Although higher laser repetition rates, power levels, or larger spot sizes can improve the processing rate, laser manufacturing remains relatively slow compared with alternative etching methods, particularly for industrial applications. Furthermore, the material damage caused by lasers may be substantial, requiring thorough defect-removal etching to achieve high material quality, which is essential for PV applications. In addition, silicon dust or nanoparticles are generated during the fabrication process, necessitating the implementation of a further filtration system.
Various techniques have been developed to create b-Si surfaces with micro- and nanostructures, enabling highly controlled surface morphologies.20 A summary and comparison of different b-Si fabrication methods are presented in Table 1. For instance, porosity and thickness can be tailored during electrochemical etching in HF by adjusting the current density and etching time. Wet etching methods, such as MACE, are particularly promising for large-scale industrial applications due to their simplicity and high etching speed. The RIE process can produce silicon nanoneedles, enabling smooth refractive index transitions and achieving reflectance below 1% across a broad wavelength range and different polarizations. Thanks to the isotropic characteristics of fluorine etching and the physical removal of the passivation layer, this method is compatible with mc-Si, microcrystalline silicon (
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3 Applications
Due to its micro- and nanoscale surface structures that promote broad-spectrum light absorption, b-Si devices are anticipated to deliver improved solar energy conversion efficiency and perform exceptionally well in a range of photonic applications. Researchers and engineers worldwide continue to advance b-Si technologies, aiming to enhance its performance and economic viability.
3.1 Solar Cells
Becquerel’s observation of the PV effect in 1839 inspired the development of solar cells capable of converting sunlight into electrical energy. 118 Nowadays, silicon wafer-based solar cells lead the PV market, accounting for
Figure 9.(a) Potential technological advancements in silicon PVs based on historical efficiency improvements and ongoing research, including Al-BSF cells and PERCs. Homojunction c-Si solar cells here include Al-BSF and PERCs. Passivated contacts consist mainly of tunnel oxide-passivated contacts and silicon heterojunction-based c-Si PV modules. Reproduced with permission,121 © 2020 AIP Publishing. (b) Schematic diagram of an Al-BSF cell. (c) Schematic diagram of a PERC. (b) and (c) Reproduced with permission,122 © 2017 Elsevier. (d) Structure and carrier transport mechanisms of passivated contact solar cells. Reproduced with permission,123 © 2022 Elsevier. (e) Spectral response of tandem-configured perovskite top cells and silicon bottom cells (left). Schematic of the device structures of 2T and 4T perovskite/silicon tandem solar cells (right). Reproduced with permission,124 © 2021 John Wiley and Sons.
Among these, homojunction c-Si solar cells are the most prevalent. Compared with aluminum back surface field (Al-BSF) cells shown in Fig. 9(b), passivated emitter and rear cell (PERC) technology incorporates a layer of dielectric material to isolate the silicon backside from the aluminum contacts [Fig. 9(c)], thus minimizing rear surface recombination.122 Further advancements in silicon solar cells leveraging advanced passivating contact technology,32,125 such as metal–insulator–semiconductor (MIS) contacts, tunnel oxide passivated contact (TOPCon), dopant free asymmetric heterocontact (DASH), and silicon heterojunctions (SHJs), are expected to push efficiencies to 25% or higher. The carrier transport process in solar cells with passivating contacts is illustrated in Fig. 9(d).123 In contrast to single-junction solar cells, which are constrained by their optical bandgap, tandem solar cells [Fig. 9(e)] utilize materials with varying bandgaps to harness a broader range of sunlight. The upper cell, characterized by a large bandgap, targets high-energy photons, whereas the lower cell, featuring a smaller bandgap, effectively collects lower-energy photons, including those in the NIR range.124 The applications of b-Si in solar cells will be discussed in relation to these three categories.
3.1.1 Homojunction b-Si solar cells
To enhance efficiency and reduce costs, b-Si eliminates the need for AR coatings while achieving comparable light-trapping, making it a cost-effective option to achieve
Figure 10.(a) Diagram illustrating the mechanisms of excess carrier recombination in silicon nanostructures, in which photogenerated carriers (blue dots) are lost via Auger and surface recombination channels. (b) Carrier lifetime (
With the advantages of reduced rear surface recombination and enhanced rear surface reflectivity, PERC solar cells based on b-Si have been further explored in some works.136
3.1.2 Passivating contacts in b-Si
Using a dielectric passivation layer is a widely recognized approach to minimize surface recombination rates in solar cells. This reduction occurs via two primary mechanisms: chemical passivation, which decreases the density of interfacial states, and field-effect passivation, where an internal electric field suppresses minority-carrier density near the interface. For b-Si solar cells, the main obstacle lies in reducing recombination losses resulting from the larger surface area and its associated defects. To address these issues, Wang et al. employed thermal atomic layer deposition (ALD) to fabricate passivation layers, such as conformal
Currently, conventional micron-pyramid textures are approaching their performance limits in minimizing optical reflection losses and boosting power conversion efficiency (PCE) for TOPCon solar cells. Addressing this challenge, Li et al. developed an innovative micron-pyramid/nanopore pyramid (NPP) silicon architecture, achieving remarkable average efficiencies exceeding 23%.132,141,142Figure 10(i) shows the cross-sectional device architecture of TOPCon solar cells based on NPP structure. Compared with conventional micron-pyramid textures, the TOPCon solar cell based on NPP structure exhibited higher average PCE and exceptional wide-angle absorption capability [from 0 deg to 70 deg, Fig. 10(j)]—critical advantages for real-world outdoor photovoltaic applications.
3.1.3 B-Si–based tandem system
Recently, tandem solar cells combining perovskite and silicon have emerged as a promising innovation, offering the potential to exceed the efficiency limits of traditional silicon-based solar cells. This advancement is achieved through the strategic combination of perovskite top cells, which efficiently capture high-energy photons, and crystalline silicon bottom cells, which effectively harvest lower-energy photons. This tandem configuration enables a broader spectral response and significantly enhances overall energy conversion efficiency. In 2022, Ying et al. reported the first monolithic perovskite/silicon tandem solar cell that incorporates industrially applicable front-side nanostructured b-Si integrated with TOPCon technology [Fig. 10(k)].33 The device architecture of the nanotextured perovskite/silicon tandem solar cell is shown in Fig. 10(l). As the external quantum efficiency (EQE) and spectral response analysis shown in Fig. 10(m), the nanotexture significantly suppresses the reflectance and the nanotextured tandem achieves near-constant low reflectance due to the gradient of refractive index effect, resulting in the enhanced EQE responses for both perovskite and silicon. This design achieves effective surface passivation without compromising broadband light trapping. In addition, the reconstructed nanotexture significantly enhances perovskite wetting. As shown in Figs. 10(n) and 10(o), the reconstructed nanotexture acts as a nanoconfining scaffold, guiding vertical perovskite growth, whereas planar surfaces result in randomly oriented structures. These advances lead to a notable increase in both the current density and fill factor (FF) of tandems, ultimately achieving a certified PCE of 28.2%.
Furthermore, they conducted in-depth studies on perovskite/TOPCon tandem solar cells based on b-Si. By integrating a poly-
It is worth mentioning that the b-Si exhibits no crystallinity-related limitations during the fabrication,148 making it suitable for mc-Si with anisotropic texturing that is ineffective in alkaline solutions, as well as for diamond-wire cut mc-Si that is challenging to texture with conventional acidic solutions.149,150 Moreover, b-Si demonstrates superior metal impurity-gettering efficiency compared with planar surfaces in PV applications.151 These advantages further enhance its potential for high-performance solar cells.
3.2 Photoelectrochemical (PEC) Solar Energy Conversion
In PEC solar energy conversion, enhancing multiple properties through surface and interface engineering approaches is essential, as depicted schematically in Fig. 11. By implementing appropriate interface enhancements, such as optimized junction designs and protective/passivation coatings, it can attain strong mechanical durability and efficient charge transport. In addition, cocatalysts applied to the surface can significantly improve the reaction kinetics at the interface.10
Figure 11.Diagram depicting key surface and interface engineering approaches for b-Si photoelectrodes and their mechanisms for enhancing PEC performance.
3.2.1 H2 generation
Junction designs for efficient interface charge transfer
A key factor limiting the performance of planar and b-Si photocathodes is the limited
Figure 12.(a) Microwire array featuring tandem junctions with an embedded homojunction (
Besides buried p–n junctions, metal interfacial layers, including Ag 158 and Pt159 on the surface of b-Si, are effective in enhancing the separation and movement of photoexcited electrons. Furthermore, Lewis et al. developed an
Protection/passivation layers for enhanced stability
Many metal oxides are known for their optical transparency and chemical stability, making them effective for protecting Si-based photocathodes. Among these,
Cocatalysts for improved HER/OER kinetics
Some previous studies have shown that decorating Si photocathodes with Pt can enhance their photoelectrochemical (PEC) properties.112,169 However, the scarcity and high cost of Pt pose challenges for its use in widespread applications. As an alternative, earth-abundant transition metals (e.g., Mo, Co, and Ni) and their compounds (e.g., sulfides, phosphides, selenides) have been extensively explored due to their comparable catalytic activity.10 For example, the PEC performance of
Among transition metal compounds, Mo-based sulfides are particularly effective cocatalysts for hydrogen generation on black Si, such as
3.2.2 N2/CO2 reduction
B-Si based photoelectrodes have also been explored for nitrogen reduction applications. Ammonia (
Figure 13.(a) Illustration of the setup for PEC
In 2024, Peidong Yang’s group presented a silicon nanowire-based device for red light applications, enabling facilitating
3.3 Solar Thermal Energy Conversion
In recent years, considerable attention has been given to optimizing solar thermal energy applications through b-Si. Due to its semiconductor properties, silicon is restricted to absorbing solar wavelengths below 1110 nm (corresponding to a bandgap
Figure 14.Applications of solar photothermal energy based on b-Si.
3.3.1 Photothermal catalysis
Photothermal catalysis involves the activation or enhancement of catalytic reactions through photothermal effects. In some cases, catalysts also serve as photothermal agents, converting sunlight into heat to raise the reaction temperature. This increase in temperature can activate the reaction or enhance reaction kinetics, similar to the mechanisms observed in thermocatalysis.180
Figure 15.(a) Optical absorption of
Researchers also have explored photothermal catalysis utilizing innovative metal particles on b-Si. O’Brien et al. have investigated silicon nanowires supported with Ru nanoparticles (Ru@SiNW) for the Sabatier methanation process,
3.3.2 Photo-thermoelectric conversion
PV cells produce electricity by capturing high-energy photons. In thermophotovoltaic (TPV) systems, this principle is employed using thermal emitters that absorb heat and reach temperatures high enough to emit energetic photons. These photons are subsequently harvested by PV cells, effectively converting thermal radiation into electrical energy. In recent years, photo-thermoelectric conversion applications based on b-Si have attracted considerable interest for their promising potential in energy conversion technologies.187
In addition, it is worth mentioning that highly conductive b-Si, fabricated using an RIE technique, is capable of absorbing light across a broad wavelength range, extending well into the NIR region (
3.3.3 Solar vapour generation
Water evaporation, a natural process occurring everywhere from oceans to the human skin, carries significant energy. For example, sunlight-driven evaporation on the ocean’s surface absorbs vast amounts of energy globally. Recently, innovative technologies such as triboelectric nanogenerators192,193 and hydrovoltaic generators (HGs)194
3.4 Photonic-Related Applications
3.4.1 Photodetector
An ideal photodetector is designed to efficiently capture and detect photons across a broad range of wavelengths, angles, and light intensities, ensuring consistent performance under diverse optical conditions. Currently, the most advanced photodetectors are typically fabricated by integrating silicon pixel arrays (flip-chip) with “bandgap-friendly” materials such as indium arsenide (InAs) and indium antimonide (InSb). However, this process is expensive compared with using silicon alone, and other traditional photodiodes often face optical losses, with charge carriers frequently lost to recombination. As discussed above, traditional silicon does not absorb infrared (IR) energies above 1110 nm, restricting its functionality primarily to the visible region, particularly in photodetection applications. Progress in silicon-based IR photodetectors is vital for enhancing silicon-integrated optoelectronics and communication systems.36 A promising strategy to achieve this involves using b-Si, which extends the absorption edge of silicon into IR wavelengths below its bandgap.198 This method facilitates the development of IR detectors seamlessly incorporated into silicon wafers for use in optical communication and sensing applications. Compared with III–V semiconductors, b-Si offers three significant advantages: (i) silicon is significantly more cost-effective and has been extensively studied, ensuring its suitability for large-scale manufacturing; (ii) as a sensing material, b-Si aligns well with existing integrated circuit (IC) fabrication methods, facilitating its straightforward integration into upcoming fully silicon-based optoelectronic devices; and (iii) in contrast to epitaxial growth, ultrafast laser doping allows selective area processing without requiring masking. The “cold” nature of ultrashort laser pulses preserves the original physical and chemical characteristics of untreated areas, ensuring that unaffected regions in integrated systems remain intact. Given these advantages, b-Si materials created via ultrafast laser doping represent a promising pathway for addressing the challenges of developing efficient and cost-effective IR photodetectors, paving the way for enhanced Si-based optoelectronic integration.199
The use of ion implantation for doping in b-Si presents a versatile approach for developing IR photodetectors with tunable concentration profiles. In 2022, Tarik Bourouina’s group demonstrated that surface-doped b-Si, using phosphorus as the dopant, achieved a remarkable 98% absorptivity in the 1 to
In 2016, Hele Savin’s group introduced an innovative photodiode design [Fig. 16(a)].202 It incorporates silicon nanostructures for enhanced light absorption, uniform ALD alumina coatings to suppress surface recombination, and an induced junction to address recombination caused by dopants and irregular junction formations. This device achieves an EQE exceeding 96% across 250 to 950 nm wavelengths and maintains performance at incident angles up to 70 deg. Building on these advancements, Zhang et al. designed a self-powered Schottky photodiode based on nanocrystal indium tin oxide and b-Si (nc-ITO/b-Si).203 As illustrated in Fig. 16(b), the device incorporates nanostalagmite structures created on high-resistivity n-Si, with ITO nanocrystals serving as the rectifying layer and aluminum functioning as the rear ohmic contact. The images in Figs. 16(c) and 16(d) reveal the nc-ITO-coated nanostalagmites and b-Si photodiodes with varying ITO contact thicknesses compared with untreated planar Si. As depicted in Fig. 16(e), the built-in electric field from the nc-ITO contact, forms a “strong-field depletion region” near the surface and a “weak-field region” extending
Figure 16.(a) Diagram showing the vertical layout of a photodiode structure utilizing b-Si. Inset: SEM image of the b-Si active region coated with
Beyond visible-NIR applications, b-Si has also emerged as a promising solution for UV photodetection, where conventional technologies face two critical limitations: (i) high reflectance losses and (ii) low quantum efficiency and poor UV detection sensitivity due to surface recombination. Recent innovations have addressed these challenges by employing lightly doped b-Si to suppress dark current and enhance sensitivity, coupled with conformal
3.4.2 Surface-enhanced Raman scattering (SERS)
SERS is an advanced approach for the detection and analysis of materials, offering exceptional sensitivity, robustness against photobleaching, narrow spectral bandwidth, and the ability to detect molecular features.21 These advantages make SERS widely applicable in fields such as food safety, biomedical research, environmental monitoring, and beyond. Traditionally, SERS substrates are constructed from rough surfaces incorporating noble metals. In recent years, b-Si has attracted notable interest as a potential SERS substrate, thanks to its extensive surface area and aspect ratio, providing an excellent platform for enhanced Raman scattering.208 Viehrig et al. introduced a b-Si–based electrochemical SERS platform that adjusts the analyte–surface interaction while maintaining the integrity of the SERS substrate, allowing the sensor to be reused effectively.204 The system incorporates uniformly Au-capped Si nanopillars with electrochemical techniques to facilitate efficient real-time reuse of the SERS substrate during assays. The mechanism of this electrochemical SERS detection system, shown in Fig. 16(f), highlights the variation in surface charges on the Au-capped nanopillars and their engagement with melamine. Figure 16(g) presents an image of the fully assembled detection chamber along with an SEM image of the Au-capped nanopillar structures utilized for SERS detection. In addition, Fig. 16(h) illustrates the tailored electrochemical-SERS system and its interface arrangement. This study demonstrates an integrated electrochemical-SERS platform with enhanced detection performance, enabling real-time calibration, sensing, and substrate reusability.
Moreover, some researchers demonstrated a realistic 3D modeling methodology to simulate b-Si–based multi-stacked nanostructures with randomly distributed gold nanoparticles on the highly roughened nonflat surface.40 This method effectively links theoretical analyses to experimental optical responses, with far-field calculations accurately reproducing reflectance spectra to reveal the dependence of light trapping on the thickness of the conformal reflector and nanoparticle size, whereas near-field analysis identifies three stochastic “hotspots.” Both factors contribute significantly to overall field enhancement, which is highly sensitive to nanoscale surface morphology. This framework enables efficient control of stack configurations, amplifying localized fields in nanoparticle gaps and nanocavities, thereby maximizing electromagnetic field enhancement and the analytical enhancement factor (AEF) for SERS detection.
In brief, SERS devices based on b-Si overcome the sensitivity limitations of conventional Raman spectroscopy, offering a powerful tool for obtaining detailed structural and interface information. It is extensively applied in surface science, adsorption studies, and the analysis of molecular orientation, conformation, and structural properties. The integration of b-Si as a substrate has further elevated SERS capabilities, significantly enhancing signal strength and detection sensitivity, and paving the way for broader and more advanced applications in various fields.
3.4.3 Imaging applications
Mass spectrometry imaging (MSI) is gaining prominence in the field of omics, particularly in proteomics and metabolomics. Stefania et al. explored the fabrication and application of b-Si and gold-coated black silicon (AuBSi) substrates in surface-assisted laser desorption/ionization mass spectrometry imaging (SALDI-MSI) for analyzing animal tissues and human fingerprints.43 Cross-sectional SEM images of b-Si and AuBSi are displayed in Fig. 16(i). During the experiment, the SALDI-MS performance was improved by coating b-Si surfaces with gold nanoparticles through sputtering. As demonstrated in Fig. 16(j), the sample based on AuBSi substrates effectively detected fingerprint metabolites and analytes originating from animal tissues under both positive and negative ionization conditions, enabling high-quality imaging of mouse brain and liver tissues. Utilizing biocompatible materials such as silicon and gold allows for matrix-independent analysis of metabolites directly on biological samples, paving the way for safer and more versatile imaging techniques.
In addition, Jianmin Wu’s group introduced a method for tissue imprinting based on SiNWs capped with 2D nanoflakes (
Notably, extensive studies have explored the potential applications of b-Si in sensing209
3.5 Challenges of b-Si in Solar and Photonic Applications
Based on the discussion above, b-Si exhibits significant potential for solar energy conversion and photonics applications; however, its implementation encounters several challenges. Although its nanostructured surface significantly reduces reflectance and enhances light absorption—particularly in the ultraviolet and infrared ranges—the inherent surface roughness and associated defects can increase carrier recombination, shortening the lifetime of non-equilibrium charge carriers. In addition, the rough surface morphology may introduce high and sometimes non-uniform doping concentrations, posing significant challenges for forming a reliable silicon/metal contact.20 These factors collectively diminish solar energy conversion efficiency, reduce the signal-to-noise ratio in photodetectors, introduce unwanted background noise in SERS, and degrade image resolution in optical sensing applications. For SERS application, further functionalization with plasmonic nanoparticles (e.g., Au or Ag) is necessary to achieve high enhancement factors, but this introduces fabrication complexity and may compromise stability under laser irradiation. Thus, optimizing the trade-off between optical absorption and surface recombination remains critical for photonic devices based on b-Si.
Second, b-Si structures suffer from the bottleneck of hasty surface photo-oxidation, photo-corrosion, and indigent acid stability, where the high surface area accelerates surface corrosion in the PEC system. This instability limits quantum efficiency and long-term performance.29,216 Passivation techniques, such as protective coatings, chemical treatments, or catalyst integration, are often needed to mitigate these issues and improve surface charge transfer but also increase manufacturing complexity and cost.
Third, the irregular morphology of b-Si can enhance plasmonic effects, but achieving uniform and reproducible signal amplification remains difficult due to inconsistent nanostructuring for SERS application. Across these applications, precise control over nanostructure geometry and seamless integration with existing optoelectronic systems complicate fabrication and scalability. Balancing optical performance with device reliability and manufacturability is an ongoing challenge in advancing b-Si–based technologies.
Finally, although some aforementioned fundamental limitations related to b-Si applications have been addressed in laboratory settings, industrial viability in scalable fabrication presents additional challenges. More comprehensive cost and lifecycle analysis would be required for b-Si to transition into the mainstream technology for solar energy conversion. Techniques such as MACE and RIE have obtained high expectations in industrial production. MACE, in particular, is favored for commercial solar cells due to its compatibility with the existing manufacturing lines based on wet chemical etching, and there are pioneers in the field already mass-producing b-Si solar cells.217,218 However, challenges such as metal contamination and waste etching solution treatment remain critical concerns, thus reducing the metal consumption during silicon surface texturing should be recommended as a reliable route. RIE, on the other hand, offers advantages for industrial applications, including large-scale preparation, rapid processing, and the absence of noble metal contamination.132 However, RIE faces its own challenges, such as high equipment costs, the need for precise plasma control to avoid excessive ion-induced surface damage, and potential limitations in achieving ultra-deep nanostructures with uniform aspect ratios.
4 Conclusions and Perspectives
B-Si nanostructures have demonstrated immense potential for a variety of solar energy conversion and photonic applications. Various techniques are available for creating b-Si with diverse structures, including nanoscale spikes, cones, vertical cylinders, and porous silicon. These methods are typically more cost-effective than many advanced fabrication approaches, making b-Si a promising candidate for commercialization in various applications. The remarkable unique optical and electronic properties imparted by the high-aspect-ratio nanostructures, including broadband light absorption, enhanced carrier collection, and tailorable optical responses, position b-Si as a highly appealing material for pushing the boundaries of solar energy conversion and various photonic devices.
In the realm of solar energy conversion to electrical, chemical, and thermal energy, b-Si has demonstrated superior capabilities in improving light absorption and carrier collection compared to planar silicon, leading to record-breaking solar cell efficiencies. Further optimizations in nanostructure design, passivation schemes, and device architectures hold promise for continued advancements in b-Si solar cell performance. Integrating b-Si into tandem and multi-junction solar cell configurations could also unlock new pathways for boosting overall conversion efficiencies. In PEC systems and thermal energy conversion, the development of hybrid systems that combine the strengths of b-Si with other nanostructured materials may pave the way for innovative solutions in renewable energy technologies.
For photonic applications, the broadband and tunable optical absorption of b-Si enables high-sensitivity, spectrally versatile devices. Recent developments in b-Si photodetector have demonstrated impressive responsivities and bandwidths, opening new opportunities for their adoption in diverse sensing and imaging technologies. Exploring novel device structures and incorporating them with complementary metal-oxide-semiconductor (CMOS) electronics could further enhance the functionality and practicality of b-Si photodetectors. Moreover, the distinctive optical characteristics of b-Si nanostructures show great promise in AR coatings, optical filters, metamaterials, and so on. Harnessing the ability to precisely control the optical responses of b-Si through nanostructure engineering could lead to the development of innovative photonic technologies and components.
As the research on b-Si nanostructures continues to evolve, several key areas of investigation warrant further exploration. These include developing scalable and cost-effective fabrication techniques, optimizing nanostructure morphologies for specific applications, enhancing the thermal and mechanical stability of b-Si, and seamlessly integrating it with existing semiconductor technologies. Of these, control over the uniformity and reproducibility of nanostructures is critical for scaling up production and ensuring consistent performance in commercial applications. Furthermore, although b-Si demonstrates excellent absorption in the visible spectrum, enhancing its performance in the NIR region remains an area for further research. Addressing these challenges will be crucial for translating the promising laboratory-scale demonstrations of b-Si into practical, large-scale, and commercially viable products. Notably, recent advancements in artificial intelligence (AI) present exciting opportunities for accelerating progress, and AI-assisted approaches on b-Si have the potential to accelerate advancements by optimizing fabrication processes, predicting material properties, and identifying novel applications across energy and photonic technologies.149 This integration of AI into b-Si research holds significant promise for driving innovation in efficient and scalable solutions in the future.
Overall, the remarkable optical and electronic features of b-Si nanostructures, coupled with the ongoing refinement of fabrication processes, highlight its potential to drive innovation in solar energy conversion and a wide range of photonic devices.
Huaping Jia is currently a postdoctoral fellow in the Department of Applied Physics at the Hong Kong Polytechnic University. She received her BEng degree in communication engineering in 2013 and her PhD in electronics science and technology in 2022, both from Taiyuan University of Technology. Her current research interests cover mainly surface plasmonic effects in solar energy conversion and photonics.
Fengjia Xie obtained her PhD from the Department of Applied Physics at the Hong Kong Polytechnic University in 2024. She is currently a postdoctoral fellow focusing on photocatalysis and microfluidics.
Elyes Nefzaoui earned his PhD from the University of Poitiers, France, in 2013. Following a postdoctoral appointment at the CNRS Centre for Energy and Thermal Sciences of Lyon (CETHIL), he joined the University Gustave Eiffel where he managed the Energy Graduate Program at the ESIEE Paris School of Engineering. Currently, he is an associate professor at the University of Gustave Eiffel, CNRS, ESYCOM Laboratory, leading the energy harvesting group. His research focuses on infrared meta-materials for energy applications, heat transfer in electronic devices, thermal energy harvesting, and the development of sensors, sensor networks, and data analytics for environmental and energy monitoring.
Tarik Bourouina received his PhD in 1991 and his habilitation (HDR) in 2000 from Université Paris-Saclay. He has been a professor in physics at ESIEE Paris, Université Gustave Eiffel since 2002. He is also affiliated with the French National Center for Scientific Research (CNRS), within the CINTRA laboratory IRL 3288 in Singapore jointly with Nanyang Technological University (NTU) and THALES, and within the ESYCOM laboratory UMR9007 in France. His interests include micro-scale physics and silicon-based metasurfaces.
Heng Jiang obtained his BE and ME degrees from the School of Power and Energy, Northwestern Polytechnical University, China, in 2018 and 2021, respectively. He earned his PhD from the Department of Applied Physics at the Hong Kong Polytechnic University in 2025, where he is currently a postdoctoral fellow. His research interests include artificial compound eyes and microfluidics.
Xuming Zhang is currently a full professor at the Photonics Research Institute and Department of Applied Physics, The Hong Kong Polytechnic University. He received his BEng degree from the University of Science & Technology of China (USTC) in 1994 and his PhD from Nanyang Technological University (NTU) in 2006. His research has produced more than 160 journal papers. Recently, he set up two start-up companies. His current research interests cover mainly nanophotonics, plasmonics, microfluidics, artificial photosynthesis, biomimetics, and green energy.
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Huaping Jia, Fengjia Xie, Elyes Nefzaoui, Tarik Bourouina, Heng Jiang, Xuming Zhang, "Black silicon nanostructures for solar energy conversion and photonic applications: a review," Adv. Photon. 7, 034004 (2025)
Category: Reviews
Received: Dec. 9, 2024
Accepted: Apr. 29, 2025
Published Online: Jun. 11, 2025
The Author Email: Heng Jiang (heng21.jiang@connect.polyu.hk), Xuming Zhang (apzhang@polyu.edu.hk)