In the rapidly evolving landscape of human-machine interaction, sensors play a crucial role in bridging the gap between physical and digital realms[
Journal of Semiconductors, Volume. 46, Issue 1, 012601(2025)
A smart finger patch with coupled magnetoelastic and resistive bending sensors
In the era of Metaverse and virtual reality (VR)/augmented reality (AR), capturing finger motion and force interactions is crucial for immersive human-machine interfaces. This study introduces a flexible electronic skin for the index finger, addressing coupled perception of both state and process in dynamic tactile sensing. The device integrates resistive and giant magnetoelastic sensors, enabling detection of surface pressure and finger joint bending. This e-skin identifies three phases of finger action: bending state, dynamic normal force and tangential force (sweeping). The system comprises resistive carbon nanotubes (CNT)/polydimethylsiloxane (PDMS) films for bending sensing and magnetoelastic sensors (NdFeB particles, EcoFlex, and flexible coils) for pressure detection. The inward bending resistive sensor, based on self-assembled microstructures, exhibits directional specificity with a response time under 120 ms and bending sensitivity from 0° to 120°. The magnetoelastic sensors demonstrate specific responses to frequency and deformation magnitude, as well as sensitivity to surface roughness during sliding and material hardness. The system’s capability is demonstrated through tactile-based bread type and condition recognition, achieving 92% accuracy. This intelligent patch shows broad potential in enhancing interactions across various fields, from VR/AR interfaces and medical diagnostics to smart manufacturing and industrial automation.
1. Introduction
In the rapidly evolving landscape of human-machine interaction, sensors play a crucial role in bridging the gap between physical and digital realms[
Sensing of fingers primarily encompasses three phases: self-bending perception, contact-based pressure sensing, which can be further divided into normal pressure and sweeping sensing[
Another issue in creating integrated finger sensing patch is the acquisition of two types of contact-based tactile information. Traditional flexible substrate-based sensors often introduce interference due to deformation of the underlying material, compromising measurement accuracy[
Herein, we present a facile approach to address these challenges by developing a highly integrated, flexible electronic skin designed as an intelligent patch for the index finger. Our device incorporates four sensors based on resistive and giant magnetoelastic effects, enabling simultaneous collection of surface pressure and finger joint bending information. This innovative design allows for the identification of three phases of finger action: the finger’s bending state, dynamic contact behavior, and gripping force. By integrating resistive carbon nanotubes (CNT)/polydimethylsiloxane (PDMS) films for bending and dynamic contact sensing with self-powered magnetoelastic sensors for pressure detection, our system achieves comprehensive tactile perception with high sensitivity and rapid response. This integrated approach not only overcomes the limitations of traditional sensing methods but also paves the way for more nuanced and accurate finger-based interactions in VR/AR environments, medical diagnostics, and industrial applications.
2. Experimental section
2.1. Materials & preparation
For the microcilia-based bending sensor, carbonyl iron particles (CIP) were obtained from Sigma Aldrich (USA). Polydimethylsiloxane (PDMS) base and curing agent (Sylgard 184 kit) were sourced from Dow Corning, USA, and were uniformly mixed with CIP to prepare the magnetic composite for microcilia formation. This mixture was spin-coated onto a 5 × 5 cm2 glass slide to create an uncured thin film. The film was then placed on a NdFeB permanent magnet (5 × 5 × 2.5 cm3) with a surface magnetic field of 400 mT, procured from China Jiuji Co., Ltd. Under the combined effects of gravity, surface tension, and magnetic force, the mixture self-assembled into a microcilia structure guided by the magnetic field. The magnet and the PDMS/CIP composite were then transferred to an oven set at 40 °C for 2 h to achieve complete curing. Subsequently, a conductive surface network was created by spray-coating the structure with conductive carbon black (VXC-72R) dispersed in cyclohexane. The carbon black, with an average particle diameter of 30 nm, was provided by Cabot Co., USA, while the cyclohexane was sourced from Damao Chemical Reagent Factory (Tianjin, China). This spray-coating process aimed to establish a conductive network on the surface of the microcilia structure, realizing its strain-sensing capabilities. (
Figure 1.(Color online) Schematic illustration of the main fabrication process for the smart finger patch (SFP). (a) Manufacturing process of the microcilia-based inward bending resistive sensor, including spin-coating, magnetic field-guided microcilia self-assembly, and carbon black spray coating. (b) Fabrication of the magnetoelectric generator (MEG) based on magnetized micropillars, including template method and magnetization. (c) Integration and encapsulation of the SFP.
For the micropillar array-based MEG sensor, a plastic mold with pre-designed micro-hole arrays was utilized as a template for micropillar (NdFeB/Ecoflex) preparation. Neodymium-iron-boron (NdFeB) particles were sourced from Magnequench, China, while EcoFlex was obtained from Smooth-On, Inc., USA. The EcoFlex gel and NdFeB particles were uniformly mixed at a specific mass ratio. This composite was then poured into the plastic mold and cured on a hot plate at 80 °C for 20 min. After solidification, the cured NdFeB/Ecoflex composite was removed from the mold and placed in a magnetic field with a strength of approximately 3 T and desired orientations for magnetization (
The copper coil was laser patterned using a laser engraving machine (LPKF ProtoLaser U4, LPKF Laser & Electronics AG, Germany). Each loop had a width of approximately 70 µm, with a distance of about 80 µm between adjacent conductive lines. The coil consisted of 30 turns, separated by an insulating polyimide film. Post-engraving, the coil was treated in citric acid to remove the oxidized layer, and conductive silver glue was applied to unite both layers. Finally, plastic encapsulation was used to protect the coil from oxidation during application.
Upon completion of the individual components, a finger-shaped substrate was carved from a plastic template. The depth of this substrate was set at approximately 200 μm, a dimension carefully chosen to balance wearable comfort with the need to accommodate the embedded coil thickness. Double-sided adhesive tape was used to attach the device to the index finger. PDMS, mixed at a 10 : 1 ratio, was applied via a scraping method to adhere the bending sensor, MEG sensor, and copper coils to the fingertip, DIP joint, MIP joint, and the inside of the proximal phalange of the index finger, respectively (
2.2. Characterizations & measurements
The SEM images were obtained using field-emission scanning electron microscopy (FE-SEM, Carl Zeiss, Germany). Variations in magnetic flux and corresponding field intensity were measured using a commercial Gauss meter (Model HT20, HengTong Magnetoelectricity Ltd., Shanghai, China). For testing the bending sensor, real-time electrical signal measurements were conducted by covering both ends of the device with silver paste and adhesive copper foil to ensure good electrical connections. These connections were secured with tape and linked to an external digital multimeter (34460 A, Keysight) to record resistance changes. The device was vertically fixed to a mechanical test system (Mark-10, China) without applying external strain. As the unfixed end moved, the PET substrate bent along with the device, and the corresponding resistance changes were recorded in real time. By defining the bending direction, both inward and outward bending could be achieved, and the respective resistance changes were monitored. To assess cyclic stretching performance, the stretching machine conducted signal testing under −120° to 120° bending loads. Additionally, 400 stretching cycles were performed under 8 different inward bending conditions to confirm the long-term stability of the sensor. The response time and responsiveness of the prepared device were determined by controlling the periods of cyclic stretching and release.
For the MEG sensor test, the assembly was fixed on a mechanical testing system (Mark-10, China). The mechanical indenter was set to deflect the apex of the micropillars horizontally at various loading speeds. Simultaneously, the electrical signals generated in the coil were recorded by an external voltmeter (34460 A, Keysight). Further tests were conducted to evaluate the MEG sensor’s response to different materials. This was achieved by attaching 1 cm thick samples of various materials (iron block, glass, PDMS, Ecoflex) to the indenter. Cyclic pressure loading was then applied at a speed of 500 mm∙min−1 to obtain the MEG sensor's pressure response for these different materials. To assess the device's sensing performance for various surface roughnesses, it was fixed to a platform. A motorized platform, controlled by a system (MAR 100–90, Zolix Instruments Co. Ltd., China), was used to sweep the sensor across sandpaper and printing paper attached to glass slides. The voltage signals were recorded using the external voltmeter. Additionally, practical tests were conducted using four digital multimeters to capture natural gripping signals from a human right index finger wearing the device.
Moreover, the MEG sensor demonstrates a specific response to sliding motions due to the tilting of magnetized micropillars caused by frictional forces, resulting in changes in magnetic flux. Notably, the sensor can distinguish between smooth and rough surfaces during sliding. This differentiation stems from the vertical oscillations of the micropillars as they traverse surface irregularities of rough textures, manifesting as fluctuations in the signal output. Moreover, this force interaction-based sensing behavior responds to different materials. When the indenter is replaced with 1 cm thick blocks of iron, glass, PDMS (10 : 1 ratio), and ecoflex, and subjected to the same speed (500 mm∙min−1) and maximum displacement (1.8 mm) compression, distinctly different electrical responses are observed. Notably, the signals corresponding to the rebound process increase with the rising Young’s modulus of the materials, attributable to the varying energy storage and release characteristics of materials with different elastic properties during the compression and rebound cycle. The ability to differentiate between materials and surface textures through force interactions demonstrates the sensor’s potential for advanced tactile perception. This capability could be valuable in applications such as robotic manipulation, virtual reality interfaces, quality control in manufacturing, and medical diagnostics. By providing rich, multi-dimensional tactile information, including force magnitude, frequency, material properties, and surface textures, this MEG sensor opens up possibilities for creating more sophisticated and responsive human-machine interfaces across various fields.
3. Results and discussion
The human hand plays a crucial role in mechanical human-machine interactions, serving as a key approach for realizing virtual reality applications across various domains, including entertainment[
Figure 2.(Color online) (a) Schematic diagram of the application of smart finger patch (SFP) in the field of human-computer interaction. (b) Three common phases of index finger sensing, contact-based drip, contact based command input and self-bending. (c) Schematic diagram of SFP corresponding to the three functional phases and (d) the partition mechanism.
The magnetized micropillar arrays and flexible coils operate based on the giant magnetoelastic effect, a phenomenon that allows for significant changes in the magnetic field within an elastic system in response to applied stress. This effect arises from the strong coupling between the mechanical and magnetic properties of certain materials. The magnetic elastomer is fabricated from NdFeB-doped ecoflex, molded into a 3 × 3 array of micropillars with a diameter of 1 mm and height of 2 mm, as shown in the scanning electron microscope image in
The microcilia-based bending sensors offer precise detection of finger joint angles, allowing for accurate tracking of self-initiated movements and gestures. These sensors can distinguish between various degrees of bending, providing detailed information about the finger’s posture and movement patterns. As described in the "Materials & preparation" Section, the main structure for achieving inward bending is realized through the surface-conductive microcilia structure of the sensor. The microcilia structure is obtained through self-assembly of uncured PDMS/CIP mixture in a magnetic field. After curing, a conductive network is further constructed by spraying conductive carbon black nanoparticles dispersed in cyclohexane solution. Cyclohexane has a swelling effect on PDMS, therefore, during the spraying process, combined with the impact force of the spray, the carbon nanoparticles achieve more secure anchoring. This allows for easy changes in the conductive network through contact rather than just compression, when inward bending occurs, resulting in a decrease in resistance. Conversely, during outward bending, the separation of surface microstructures and their own tensile deformation lead to an increase in resistance. Consequently, the device exhibits significant relative resistance changes as electrical signal responses in the range of −120° (outward bending) to 120° (inward bending), as shown in
Figure 3.(Color online) (a) Resistive response of the microcilia-based bending sensor during the flexion process from −120° to 0° to 120°. (b) Resistance change rate when performing 50 cycles of inward bending at 5°, 10°, 20°, 40°, 60°, 80°, 90°, and 120° in the direction shown in the inset. (c) The response time and recovery time of the bending sensor. (d) Characteristic resistance response signals of two bending sensors equipped on the two joints of the index finger under four grasping states, indicating the bending conditions at the two joints.
As the primary contributors to dynamic sensing, the MEG sensors constructed with magnetized micropillar arrays are inspired by the sensing principles of human cilia. These sensors enable high-sensitivity detection of external forces and pressures applied to the finger. This capability allows for the quantification of interaction forces during object manipulation and tactile exploration of surfaces with varying textures and materials. The structure of these micropillars is obtained in a single step through a simple templating method, followed by magnetization to achieve directional magnetic fields (see "Materials & preparation" Section for detailed fabrication process, see optimization process in supplementary information text, Figs. S1−S2). The NdFeB/Ecoflex micropillars have a relatively low Young’s modulus, making them more susceptible to deformation under external forces. To optimize gripping functionality and force sensing, we designed micropillars with a 1 mm diameter and 2 mm height, featuring a dome-shaped top. This geometry accommodates various force directions encountered during diverse gripping processes. Recognizing that finger-object interactions involve distributed forces rather than point contacts, we implemented a 3 × 3 array of these micropillars. This configuration enables force sensing over a larger area, providing comprehensive grip force representation. The dome structure enhances force distribution and multi-directional sensing, while the array design improves overall sensitivity, allowing for detection of force gradients and patterns across the fingertip.
Figure 4.(Color online) (a) Schematic diagram and optical images of the MEG sensor based on micropillar arrays under normal pressure deformation and (b) schematic diagram of the relative magnetic flux change during the process. (c) Output voltage in the copper coil under pressure loading at different frequencies. (d) Output voltage in the copper coil under different indenter displacements. (e) Comparison of output voltage when sliding on smooth and the surface of artificial steps. (f) Comparison of output voltage when pressing on materials with different hardness.
The MEG sensor also demonstrates a specific response to sliding motions, enabling the detection of surface textures. During sliding, the magnetized micropillars tilt due to frictional forces, causing changes in magnetic flux. This mechanism allows the sensor to distinguish between smooth and rough surfaces, as illustrated in
The integration of these two sensing modalities in a single, flexible smart finger patch (SFP) provides a comprehensive solution for sensing of index finger. The SFP is constructed on a PDMS substrate, with strategically placed sensors on the finger pulp, the DIP joint, the MIP joint, and the muscles on the inside of the proximal phalange of the index finger (see "Materials & preparation" Section for details). This design enables the detection of both dynamic force interactions and bending degrees, offering integrated approaches to tactile sensing that overcomes the limitations of visual methods in perceiving mechanical properties of objects. Although visual sensing methods is effective for many tasks, they often fall short in accurately detecting and differentiating subtle mechanical properties such as softness, elasticity, or texture. These properties are crucial in various applications where the physical interaction between a robotic system and its environment is essential. The SFP’s ability to capture both force interactions and bending degrees provides a rich set of data that can complement or even surpass visual information in scenarios where mechanical properties play a key role in object identification and manipulation. Furthermore, both the MEG sensor and the microcilia-based inward bending sensor have been demonstrated to possess high environmental stability. For the MEG sensor, previous studies have shown that PDMS/NdFeB thin-film sensors maintain performance even after prolonged exposure to humid conditions, such as a week of immersion in artificial sweat, and exhibit consistent output across various temperatures[
Building upon the SFP’s capabilities, this study explores its application in food quality assessment, particularly in bread recognition. The texture and freshness of bread products are crucial factors in determining their quality and consumer acceptance. Conventional inspection methods are often limited to assessing size and color, but human perception places greater emphasis on "freshness" and texture. The SFP’s high sensitivity and low response time, combined with its dual-sensing modalities, make it admirable for this application.
Figure 5.(Color online) Robotic tactile methods for bread identification using non-visual sensing techniques. (a) Signal recordings from the M1, R1, R2, and M2 sensors of the SFP-based system during a 5-s grasping cycle for five types of bread (donut, small soft bread, large soft bread, small hard bread, large hard bread). (b) Diagram of the deep learning network based on the transformer architecture. (c) Schematic representation of the robot's application of SFP tactile technology for the discrimination of bread types and quality assessment. (d) Graph of training and validation accuracy for the deep learning network. (e) Confusion matrix illustrating the classification outcomes of the deep learning network.
4. Conclusion
Herein, this study presents a smart finger patch designed for the index finger, integrating resistive and giant magnetoelastic sensors to achieve comprehensive tactile perception. The device successfully addresses the challenge of coupled perception of both state and process in dynamic tactile sensing, a crucial aspect for advancing human-machine interfaces in the Metaverse and VR/AR era. The SFP, comprising resistive CNT/PDMS films and magnetoelastic sensors, enables the detection of three key phases of finger action: bending state, dynamic contact behavior, and gripping force. The inward bending resistive sensor, featuring self-assembled microstructures, demonstrates excellent directional specificity and sensitivity. Concurrently, the magnetoelastic sensors exhibit remarkable responsiveness to various mechanical stimuli, including frequency, deformation magnitude, surface roughness, and material hardness. The system’s practical applicability is validated through a tactile-based bread type and condition recognition test, achieving an impressive 92% accuracy. This demonstration underscores the potential of the SFP in non-visual object recognition and quality assessment tasks. The developed electronic skin shows promise for a wide range of applications beyond VR/AR interfaces, including medical diagnostics, smart manufacturing, and industrial automation. While this study focuses on the index finger as a characteristic case due to its crucial role in tactile interactions, the technology demonstrates potential for extension to the entire hand. Its ability to provide rich, multidimensional tactile information opens new avenues for enhancing human-machine interactions in both virtual and real-world environments.
[11] R Maas, S Leyendecker. Structure preserving optimal control simulation of index finger dynamics. The 1st Joint International Conference on Multibody System Dynamics, 1, 1(2010).
[28] Y C Wang, S Q Dai, D Q Mei et al. A flexible tactile sensor with dual-interlocked structure for broad range force sensing and gaming applications. IEEE Trans Instrum Meas, 71, 9502710(2022).
[31] M Keller, R Barnes, C Brandt. Evaluation of grip strength and finger forces while performing activities of daily living. Occupational Health Southern Africa, 187(2022).
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Ziyi Dai, Mingrui Wang, Yu Wang, Zechuan Yu, Yan Li, Weidong Qin, Kai Qian. A smart finger patch with coupled magnetoelastic and resistive bending sensors[J]. Journal of Semiconductors, 2025, 46(1): 012601
Category: Research Articles
Received: Aug. 19, 2024
Accepted: --
Published Online: Mar. 6, 2025
The Author Email: Li Yan (YLi), Qin Weidong (WDQin), Qian Kai (KQian)