Chinese Journal of Lasers, Volume. 14, Issue 1, 57(1987)

A XeCl ezcimer laser with automatic preionization

[in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2, [in Chinese]2, [in Chinese]2, [in Chinese]2, [in Chinese]2, and [in Chinese]2
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    The effects of some parameters in XeCl excimer laser with automatic preioniza-tion on the laser output are described. The maximum output energy of 120 mJ per pulse has been obtained when the ratio of storage capacitor Cs and peaking capacitor Op is equal to 2.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A XeCl ezcimer laser with automatic preionization[J]. Chinese Journal of Lasers, 1987, 14(1): 57

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    Paper Information

    Category: laser devices and laser physics

    Received: Sep. 25, 1985

    Accepted: --

    Published Online: Aug. 10, 2012

    The Author Email:

    DOI:

    CSTR:32186.14.

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