Piezoelectrics & Acoustooptics, Volume. 44, Issue 6, 925(2022)

Study on Calibration of Sensitivity and Frequency Response Characteristics of Piezoelectric Thin Film Vibration Sensor

WANG Siqi1, WANG Zhongrui1, WU Zhijian1, LIU Yeming2, and XIN Yi1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    The piezoelectric thin film vibration sensors have developed rapidly in recent years and have been widely used in structural health monitoring, medical electronics, acceleration, device vibration and other measurements. Aiming at the performance detection of piezoelectric thin film vibration sensor, a set of calibration equipment for the sensitivity and frequency response characteristics of piezoelectric sensor is designed in this paper. The calibration equipment uses the frequency adjustable vibration table as its core part. The vibration signal is provided by the adjustable frequency vibration table, and the vibration test on the standard piezoelectric sensor and the self-made sensor is carried out simultaneously. The test results show that the equipment can easily calibrate the sensitivity and frequency response characteristics of the measured sensor. The overall design of the calibration system is simple and easy to operate. At the same time, the system has small volume, high stability and small measurement error, which is convenient for the detection of various types of piezoelectric vibration sensors, and has strong practicability and broad development space. Based on the calibration of the self-made piezoelectric thin film sensor performance by the system, the influencing factors on the sensitivity of the piezoelectric thin film sensor are studied.

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    WANG Siqi, WANG Zhongrui, WU Zhijian, LIU Yeming, XIN Yi. Study on Calibration of Sensitivity and Frequency Response Characteristics of Piezoelectric Thin Film Vibration Sensor[J]. Piezoelectrics & Acoustooptics, 2022, 44(6): 925

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    Paper Information

    Received: May. 6, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.06.019

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