The preparation process of a surface perturbation target on a brominated polystyrene foil was introduced in this paper. Through a laser interference process and Nickel-electroplate figure-transfer process, a Ni-plate with sine modulated perturbation figure was obtained. Taking further steps to transfer the sine perturbation figure on the brominated polystyrene foil by spin-coating, doctor-blade casting and the thermal press process were studied. The transfer-precision of sine perturbation figures on the brominated polystyrene foil was measured by SEM and an α-step apparatus. The Bromine content in the brominated polystyrene was controlled. The surface roughness on the surface perturbation target of the brominated polystyrene foil was analysed.