Optics and Precision Engineering, Volume. 33, Issue 12, 1831(2025)

Adaptive measurement of off-axis aspheric surfaces of differential confocal based on spatial constraints

Weikuo MA, Lirong QIU, Yihao LI, Weiqian ZHAO, and Yuhan LIU*
Author Affiliations
  • MIIT Key Laboratory of Complex-field Intelligent Exploration,School of Optics and Photonics, Beijing Institute of Technology,Beijing100081,China
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    The asymmetrical shape of the off-axis aspheric surface and the nonlinear change of its surface curvature bring challenges to the high-precision measurement of surface shape. In order to solve the problem that existing off-axis aspheric surface shape measurement methods were highly dependent on precise initial alignment of the test piece and showed poor adaptability to curvature variations, we proposed a spatially-constrained differential confocal adaptive measurement method to achieve adaptive and high-precision measurement of off-axis aspheric surfaces without initial pose dependence. First, based on the translation-rotation scanning measurement principle and the demonstrated performance of differential confocal technology in anti-surface inclination accurate fixed focusing, we developed a spatial constraint model incorporating both distance and tilt angle parameters between designed measurement points and actual test locations. This model enabled optimized spiral scanning path planning with curvature-adaptive adjustment capability for off-axis aspheric surfaces. Experimental verification demonstrated surface form accuracy with root mean square (RMS) errors below 10 nanometers and 3σ values under 5 nanometers compared to Zygo interferometer references, meeting the requirements of high-precision measurement of off-axis aspheric surfaces.

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    Weikuo MA, Lirong QIU, Yihao LI, Weiqian ZHAO, Yuhan LIU. Adaptive measurement of off-axis aspheric surfaces of differential confocal based on spatial constraints[J]. Optics and Precision Engineering, 2025, 33(12): 1831

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    Paper Information

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    Received: Mar. 25, 2025

    Accepted: --

    Published Online: Aug. 15, 2025

    The Author Email:

    DOI:10.37188/OPE.20253312.1831

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