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Chinese Journal of Lasers, Volume. 8, Issue 12, 4(1981)

A UV-preionized KrF excimer laser with an output energy of 0.42 J

Yuan Cailai, Shangguan Cheng, Ye Chao, Dou Airong, and Ling Yingyi
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    Experimental studies on the high power and high effeeiency UV-preionized KrF (=248 nm) excimer laser are reported. The maximum output energy per pulse is over 420 mj. Characteristics of lasing and fluorescence spectrum for KrF are studied. The effect of additive Ne gas in the mixture on lasing energy is examined.

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    Yuan Cailai, Shangguan Cheng, Ye Chao, Dou Airong, Ling Yingyi. A UV-preionized KrF excimer laser with an output energy of 0.42 J[J]. Chinese Journal of Lasers, 1981, 8(12): 4

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    Paper Information

    Category: laser devices and laser physics

    Received: Feb. 26, 1981

    Accepted: --

    Published Online: Aug. 17, 2012

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology