Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 479(2025)

Method for Suppressing Spurious Based on S0 Mode Resonator

GUO Tianci1,2, SHUAI Yao2,3, LUO Wenbo2,3, WU Chuangui2,3, and ZHANG Wanli2,3
Author Affiliations
  • 1School of Optoelectronic Engineering,Chongqing University of Postsand Telecommunications,Chongqing 400065,China
  • 2Chongqing Microelectronics Industry Technology Research Institute,University of Electronic Science and Technology of China,Chongqing 401332,China
  • 3School of Electronic Scienceand Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China
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    Clutter suppression is a significant challenge for high-performance surface acoustic wave(SAW)resonators. To suppress the clutter occurring in high-frequency broadband resonators,we excited the S0 mode surface acoustic wave on a X-40°Y-LiNbO3(LN)/SiO2/Ta2O5/SiO2/Ta2O5/SiO2/Si substrate structure and obtained a high-frequency broadband resonator. Subsequently,an in-depth analysis of clutter suppression was conducted. Two novel IDT design schemes were proposed,simulated,and fabricated for verification. The simulation and fabrication results showed that the proposed three-busbar IDT structure provided good clutter suppression for high-frequency broadband resonators while maintaining the quality factor(Q)to values comparable to those of normal type resonators. The suppression effect of different finger shapes on clutter in the S0 mode of the resonator was also tested through fabrication.

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    GUO Tianci, SHUAI Yao, LUO Wenbo, WU Chuangui, ZHANG Wanli. Method for Suppressing Spurious Based on S0 Mode Resonator[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 479

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    Paper Information

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    Received: Jan. 5, 2025

    Accepted: --

    Published Online: Jul. 11, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.03.011

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