Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 479(2025)
Method for Suppressing Spurious Based on S0 Mode Resonator
Clutter suppression is a significant challenge for high-performance surface acoustic wave(SAW)resonators. To suppress the clutter occurring in high-frequency broadband resonators,we excited the S0 mode surface acoustic wave on a X-40°Y-LiNbO3(LN)/SiO2/Ta2O5/SiO2/Ta2O5/SiO2/Si substrate structure and obtained a high-frequency broadband resonator. Subsequently,an in-depth analysis of clutter suppression was conducted. Two novel IDT design schemes were proposed,simulated,and fabricated for verification. The simulation and fabrication results showed that the proposed three-busbar IDT structure provided good clutter suppression for high-frequency broadband resonators while maintaining the quality factor(Q)to values comparable to those of normal type resonators. The suppression effect of different finger shapes on clutter in the S0 mode of the resonator was also tested through fabrication.
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GUO Tianci, SHUAI Yao, LUO Wenbo, WU Chuangui, ZHANG Wanli. Method for Suppressing Spurious Based on S0 Mode Resonator[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 479
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Received: Jan. 5, 2025
Accepted: --
Published Online: Jul. 11, 2025
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