Acta Optica Sinica, Volume. 4, Issue 10, 946(1984)
A new type of automatic ellipsometer
In this paper, we describe a new electro-optical compensated automatic ellipsome-ter. The design principles are discussed in detail and the measurement results on SiO2 film are given. A new type of automatic spectrum-ellipsometer may be developed based on it.
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XIB BEIXING. A new type of automatic ellipsometer[J]. Acta Optica Sinica, 1984, 4(10): 946
Category: Thin Films
Received: Jan. 30, 1984
Accepted: --
Published Online: Sep. 15, 2011
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CSTR:32186.14.