A selective multiphoton dissociation process of CF3I has been used to enrich C-13 with 9.6m B(14) line of TEA CO2 laser. At-8, an enrichment factor of 89 has been achieved for 0.2 Torr CFeI and 4 Torr O2 reaction system. The dependence of enrichment factor upon scavenger, temperature, fluenee and dissociation yield have been investigated.