Microelectronics, Volume. 55, Issue 1, 70(2025)

Study on Total Dose Effect of SiGe-on-SOI HBT

LONG Yuedecai, LIU Xuefei, BI Jinshun, AIERKEN Abuduwayiti, WANG Zhen, WANG Gang, LIU Mingqiang, and WANG Degui
Author Affiliations
  • School of Integrated Circuit, Guizhou Normal University, Guiyang 550025, P R China
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    Total dose effects on SiGe-on-SOI HBT were studied using semiconductor device simulation tools. STI and EB spacer oxide trap charges and interface trap charges cause additional base leakage current, leading to degradation of electrical parameters in SiGe-on-SOI HBT devices. The excess base currents and normalized current gain under different bias conditions and low-temperature conditions were analyzed. The results show that the degradation at cutoff bias is the worst, followed by zero bias, while forward bias and saturation bias exhibit better anti-radiation performance. At low-temperature conditions, the initial generation rate and transport time of electron-hole pairs in the oxide layer decrease; oxide-trap charges and interface states are reduced due to the decrease in recombination current, so Gummel characteristics are significantly improved. After total dose irradiation of 1 Mrad (Si), fT and fmax increased by 10% and 8%, respectively. The RF characteristics are improved by the TID. This work provides a reference for the development and application of SiGe-on-SOI HBT aerospace devices.

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    LONG Yuedecai, LIU Xuefei, BI Jinshun, AIERKEN Abuduwayiti, WANG Zhen, WANG Gang, LIU Mingqiang, WANG Degui. Study on Total Dose Effect of SiGe-on-SOI HBT[J]. Microelectronics, 2025, 55(1): 70

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    Paper Information

    Special Issue:

    Received: Sep. 4, 2024

    Accepted: Jun. 19, 2025

    Published Online: Jun. 19, 2025

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.240303

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