Optics and Precision Engineering, Volume. 17, Issue 9, 2106(2009)

Preparation and analysis of UV-enhanced Zn2SiO4:Mn films for image sensors

NI Zheng-ji*, LIU Meng, ZHANG Da-wei, HUANG Yuan-shen, and ZHUANG Song-lin
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  • [in Chinese]
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    In order to enhance the UV-response of CCD & CMOS detectors, Zn2SiO4:Mn phosphor with the properties of small particle sizes,well-stabilizing and high-luminescence quantum efficiencies was chosen as a film material to be coated on the surface of a CCD or a CMOS. The Zn2SiO4:Mn thin-film on quartz substrates was prepared by the spin-coated method. The transmission spectrum,absorption spectrum,excitation and emission spectra of the Zn2SiO4:Mn thin-film were measured. The results indicate that the thin-film has stable low transmission and high absorptivity when the waveband of illuminated light is less than 300 nm. Moreover,the excitation peak of the film is 260 nm and the emission peak is 525 nm,which is at the sensitive respond band of the CCD. Meanwhile,this experiment analyzed the effects of the thickness,smoothness and stability of the Zn2SiO4:Mn thin-film on the frequency properties,the results show that the Zn2SiO4:Mn thin-film is a kind of nice thin-film which can be used to enhance UV-response of CCD & CMOS detectors.

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    NI Zheng-ji, LIU Meng, ZHANG Da-wei, HUANG Yuan-shen, ZHUANG Song-lin. Preparation and analysis of UV-enhanced Zn2SiO4:Mn films for image sensors[J]. Optics and Precision Engineering, 2009, 17(9): 2106

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    Paper Information

    Category:

    Received: Sep. 2, 2008

    Accepted: --

    Published Online: Oct. 28, 2009

    The Author Email: NI Zheng-ji (sioi@usst.edu.cn)

    DOI:

    CSTR:32186.14.

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