The ultra-precision displacement measurement was researched for the work table of a Scanning Beam Interference Lithography (SBIL) tool to improve its environmental robustness. For the displacement measuring requirement of the work table of the SBIL tool, a novel heterodyne Littrow Grating Interferometer (GI )displacement measurement system with high environmental robustness was proposed. The measuring principle of the heterodyne Littrow grating interferometer was introduced, and the design of the system and dead path error modeling method based on Elden equation was performed. An integrated mini grating interferometer with a size of 48 mm×48 mm×18 mm was fabricated. Then, the dead path error of the system was calculated based on the model. The calculation result indicates that the dead path error caused by a relative large environmental fluctuation ( temperature fluctuation in 0.01 ℃, pressure fluctuation in ±7.5 Pa, humidity fluctuation in 1.5%, and CO2 content fluctuation in ±50×10-6) is only ±0.05 nm. Finally, a comparison system based on the commercial plane mirror interferometer (PMI) and GI was designed for the principle verification and measurement stability experiment. The principle verification demonstrates that the principle of the system is right and the resolution reaches to 0.41 nm. The measurement stability experiment shows that the dead path error of GI and PMI caused by the environmental fluctuation are respectively 7.59 nm (3σ) @＜0.9 Hz&1~10 Hz and 31.11 nm (3σ) @＜0.9 Hz&1~10 Hz in a conventional laboratory environment, which indicates the environmental robustness of the GI is higher than that of the PMI.

The optimal adjacent amount range is an importance parameter in ultra precision microgroove machining of nickel phosphorous (Ni-P) plating mold for glass molding. This paper proposes a method by using small cross angle microgroove cutting to test the optimal adjacent amount range in the process of single point diamond cutting of microgrooves rapidly. In this method, the limits of the adjacent amount range is forecasted based on the similarity of the material removal form between the small cross angle microgroove cutting and the adjacent microgroove cutting. Firstly, the cross angle and microgroove depth are set as the microgroove cutting variables to perform experiments and to obtain several pairs of arrises . Then, the material removed state is analyzed based on the plastic deformation law and brittle-ductile transition theory through the observation of the gradient arrises. The section of removed material in gradient arris machining process is analyzed and compared with that of adjacent microgrooves, and their relationship is established. Finally, the differences between the exit arrises and the entrance arrises are analyzed and the adjacent amount range of the brittle-ductile transition area is determined. According to this method, the arris morphology is observed and calculated, it is found that the critical adjacent amount range of the brittle dissection phenomenal is 570-720 nm in ultra precision microgroove machining of nickel phosphorous (Ni-P) plating mold. The feasibility of the method is verified by ultraprecision machining of the brilliant microgroove mold. The mold is put into service in glass molding process and high precision optical glass microgrooves are manufactured.

An echelle spectrometer with a new optical path based on a Digital Micro Device (DMD)was proposed and a new spectrum receiving method was used to reduce the cost of the grating spectrograph and the complexity of data processing. The DMD with single wavelength getting function and an one-dimensional photomultiplier (PMT) were combined to receive spectral information of the echelle spectrometer. By which, the cost of the instrument was reduced and the spectral restore algorithm for the echelle spectrometer and the scan driving algorithm for the DMD were integrated to improve algorithm efficiency. Because the fill factor of CCD is lower than that of DMD, this kind of echelle spectrometer should be giving a higher imaging quality and higher imaging energy. According to the characteristics of the echelle spectrometer and the limited range of selected optical materials, the multi-optimization method was employed to design the optical path structure parameters of the echelle spectrometers such as quasi-direct mirror, echelle grating, prism and focusing mirror. Moreover, the Czerny-TurnerC-T structure was added into the system to correct the asymmetric aberration and three correction lenses was used to correct the spherical aberration astigmatism. Finally, the resolution of the designed spectrometer system has reached 0.01 nm and the system imaging energy in one pixel can be 70%.

The working principle, structure characteristics and advantages of the optical system in an Offner imaging spectrometer are introduced based on a concentric structure. The research and development of the Offner imaging spectrometer are overviewed. It describes in detail the commonly used three kinds of correction aberration ways, namely by changing optical element adjustable structure to correct the aberration, by aberration theory analysis based on single grating to correct the aberration and by design of a convex holographic grating to improve the resolution of the spectral image. Then, it summarizes the key problems of the Offner imaging spectrometer and emphasizes some of them should be solved in further, such as correction of the system aberration, improvement of spectral resolution and spatial resolution and enhancement of detecting weak signals. Finally, it points out that the development trend of the system is higher resolution, better detecting capability and more compact structure. Based on the research of the Offner imaging spectrometer, this paper proposes an approach to correct aberration based on the integrated design of convex holographic grating and spectrometer.

Based on the scalar theory, the influence of the blazed transmission grating with different groove angles or different groove densities on the used wavelength was researched and the energy distribution of the diffraction light of the blazed transmission grating was deduced. It was concluded that the relationship between the diffraction angle and the incident angle of the diffracted grating in the diffraction direction with the strongest energy could satisfy the Snell's law. The relationship among the angle of incidence, diffraction angle and groove angle was given, and the energy distribution law of the diffracted light at different groove densities and groove angles was studied. Then, the blazed transmission gratings were measured. It is shown that the characteristics of the existing blazed transmission gratings are consistent with that of theoretical calculation. A polydimethylsiloxane (PDMS) period-tunable blazed transmission grating was fabricated. Then, the blazed wavelength and groove density of the PDMS blazed transmission grating were measured in both stretched and free state by using the deduced formula. The results show that the measurement error of the wavelength is within 5 nm. The equivalent groove profile of the grating was fitted, which verifies the law that groove profile and groove density of the PDMS grating are changed with the tension changes in the real-time monitoring.

On the basis of Rigorous Coupled Wave Analysis( RCWA), an array of freestanding non-periodic GaN gratings were proposed to control the phase of an incident beam in the visible wavelength region. Firstly, the Finite Difference Time Domain(FDTD) method was used to calculate the optical responses of non-periodic GaN gratings based on the parameters such as period and duty cycle. Then, a double-sided process and nitride back thinning technology were developed to fabricate freestanding non-periodic GaN gratings on a GaN-on-silicon platformand to control the different phase shifts of incident light. Finally, the optical performance of non-periodic GaN gratings was experimentally demonstrated by angular resolved micro-reflectance spectra and photoluminescence spectra. The angular resolved micro-reflectance spectra show that the optical performance of the freestanding non-periodic GaN gratings is in good agreement with that of the theoretical simulations by the FDTD method. The photoluminescence spectra indicate that photoluminescence (PL) intensities of the GaN gratings are greatly improved as compared to that of the GaN-on-silicon, and their emission peaks are from 364.3nm to 378.7nm. Moreover, experimental results give that the incident angular tolerance of the GaN gratings is -25°-25° in the visible wavelength region. In conclusion, the gratings are helpful for the improvement of the light extraction efficiency.

A measuring path for grating replication and mosaic was designed based on interferometric method. In consideration of the difficulty of measuring incident light angles in the optical path for grating replication and mosaic, the influence of the angle error of the incident light on the grating replication and mosaic was analyzed. A mathematical model of mosaic grating errors was established, and the tolerance of the mosaic grating errors was given. According the requirement of incident light angle in the optical path for grating replication and mosaic, an angle adjustment structure of the interferometer was designed. On the basis of error mathematical model and the mosaic path, the relation between the incident angle error and the mosaic grating errors was analyzed for a 5 000 mm×500 mm large echelle grating. The results show that when the incident angle error is 1°, and the differences of calculation value and actual value for the Δθx, Δθy, Δz( mosaic grating errors around the x,y,z axes) are 0.002 1 μrad，0.003 3 μrad，0.348 2 nm, respectively, the wavefront error is 2.590 1 nm. Accroding to the calculation and analysis, it shows that the angle adjustment structure of the interferometer needs a dividing plate of 0.1° as the min measuring range , which can meet the requirement of the grating mosaic.

In nanoimprint lithography of infrared metallic gratings, the grating structure is easily damaged by hard template nanoimprint lithography and their polarization characteristics would be reduced. This paper proposes a flexible nanoimprint lithography as the alternative method to fabricate the bilayer metallic nano grating with a height of 100 nm and a thickness of 40 nm. The grating is suitable for working at 3-5 μm and its main parameters are the period in 200 nm, line width in 100 nm, and the aspect ratio in 1∶1. In fabrication, the master template grating structure was copied to the Intermediate PloymerSheet (IPS) material by thermal nanoimprint lithography to obtain IPS soft template for the embossing. Then, the IPS grating structure was transferred to the STU-7 resist by UV-embossing lithography to get the dielectric grating with complete and uniform structure. Finally, Al was deposited on this grating by vertical thermal evaporation, and the mid-infrared bilayer metallic nano grating was successfully fabricated. The fabricated grating was tested. The results show that the transverse magnetic transmittance of this mid-infrared bilayer metallic nano grating is greater than 70% in the 2.5-5 μm, and its extinction ratio is more than 30 dB in the 2.7-5 μm, especially it is greater than 35 dB in the 2.72-3.93 μm, showing excellent extinction ratio and polarization characteristics. These results demonstrate that the grating fabricated here has potential applications in infrared polarization detection and infrared polarization sensing.

The double frequency characteristics of KBe2BO3F2（KBBF) crystals were analyzed. A new KBBF crystal grating coupler was designed with combination of the base wave grating coupling and the total reflection properties of KBBF crystals. The design principle of KBBF crystal grating coupler was introduced .By etching diffraction grating on the surface of a KBBF crystal, the diffraction order matching with the grating was chosen to generate double frequency. The total reflection in the KBBF crystal was used to increase optical path to obtain higher frequency conversion efficiency. Then, appropriate matching types were put forward by calculating matching angle, walk-off angle, frequency factor and other parameters. And the matched grating parameters were optimized to calculate groove parameters and diffraction efficiency of grating. Moreover, grating coupler frequency conversion formulas were given and their applicable ranges were shown. Finally, crystal grating coupler based on a 5.2 mm×5.2 mm×1 mm KBBF crystal was fabricated, and the results indicate that the grating coupler realizes double frequency outputs in deep ultraviolet waveband and its total frequency conversion efficiency reaches 16.86% .

According to the requirement of Surface Acoustic Wave （SAW) sensors for quality factors, long life and low costs, a Parylene enhanced SAW sensor was developed. In consideration of metal stripping process, the LOR stripping rubber and AZ5214 double-layer spin-coating process were used to produce a trapezoidal structure, and the traditional optical lithography was used to fabricate a 2 μm superfine fork finger electrode. By utilizing MEMS technology, the sensor implements the miniaturization, but also the quantified production. The obtained quartz -based sensor shows its resonant frequency to be 249.077 953 MHz. Finally, a Parylene polymer film was coated on the surface of the sensor to increase the temperature sensitivity of the substrate. The temperature sensitivities of unenhanced SAW sensor (uncoated parylene) and enhanced SAW sensor (coated parylene) were compared experimentally. The results indicate that the temperature sensitivity of the former is 2.048 kHz/℃ and that of the latter is 2.855 kHz/℃， which is higher 0.80 kHz /℃ than that of the former. Moreover, the resonant frequency offset and the temperature of the Parylene-enhanced SAW sensor show an excellent linearity, and the linear correlation coefficient reaches to 0.99615. These experiments demonstrate that performance of Parylene-enhanced SAW sensors is superior to that of the unenhanced SAW sensors.

A guided mode resonant Circular Grating Filter (CGF) was proposed to realize its multiple band filter in the visible light regions. The reason for the formation of multiple resonance peaks in the CGF was analyzed theoretically under the polarization of the same incident beam. The freestanding CGFs with the thickness of 70 nm were realized on HfO2-on-silicon by micro/nano machining technology. An 1D linear grating was used to simulate the reflection spectrum of the circular grating. By changing the polarization conditions and the incidence angle of incident beam, the reflection spectrum of CGF was experimentally obtained by using angular resolved micro reflectometry. Experimental results indicate that the CGF forms two resonant speaks (505 nm and 575 nm) in a specific grating period (350 nm) and a duty cycle (0.5) for the surface-normal linearly polarized incident beam. The result is in great agreement with the theoretical simulations. Furthermore, the resonance peaks will shift to longer bands with the increase of the grating period under the same duty cycle. It concludes that the filtering effect of multiple bands can be realized by designing different subwavelength gratings with different structures.

With controlling the femtosecond (fs) laser polarization and scanning direction, the regular distribution of composite micro/nano structures was induced on the surfaces of silicon and stainless steel by Orthogonal Line Scanning Processing (OLSP). The influence of laser fluence on the micro/nano structures was studied. The experimental results show that two-dimensional (2D) composite structures nested with periodic ripples and nanoholes are induced on the silicon wafer surface, however, nanorod arrays at the edge of scanning area are induced on the stainless steel surface when the laser fluence is close to the material ablation threshold. The analysis indicates that the nanorod arrays are formed by the fracture of periodic ripples. Moreover, when laser fluence is higher than the ablation threshold, the regular distribution of micro hole structures is induced both on the surfaces of silicon and stainless steel. The experimental results demonstrate that the micro/nano structures induced by the first line scanning enhances its laser absorption and promotes the coupling between the incident fs laser and the surface plasma wave, so that the ablation of the second scanning is enhanced and the later structures induced by the second scanning becomes a dominating. In conclusion, the OLSP provides a new approach for fabrication of surface micro/nano structures.

The formation mechanism of subsurface damage of sapphire materials was introduced. In consideration of the boron carbide abrasives with advantage of smaller subsurface damage, the subsurface damage of a sapphire crystal after lapping by boron carbide abrasives with different particle sizes was studied based on the loose abrasive lapping method. The lapped sapphire wafer was etched by KOH chemical corrosion processing technology, the subsurface damage morphology of the sapphire crystal was indirectly reflected by specific etch pitimage and the subsurface damage depths were achieved with gritparticle sizes W20, W10 and W5 by loose boron carbide abrasive lapping. The subsurface damage morphology, surface roughness and etching rate of the sapphire crystal at different etching time were obtained also. The results show that the subsurface damage density of sapphire crystal lapped by loose boron carbide abrasive is remarkable, but the damage depth is lower, and it increases with of the abrasive sizes. After lapping by looseboron carbide abrasives with gritparticle sizes of W20, W10 and W5, the depths of subsurface damage are 7.4, 4.1 and 2.9 μm, respectively, which is about 1/2 of the size of abrasive. It indicates that the lapping method with boron carbide abrasives is beneficial to the reduction of subsurface damage of the sapphire. In addition, the sapphire wafer with low subsurface damage can be achieved quickly by lapping methods with abrasive particle sizes from larger to smaller.

For the purpose of detecting 3D geometric topography of an arc diamond wheel precisely and efficiently in aspheric element processing, the methodology of on-machine measurement and the error evaluating of 3D geometric topography were proposed. Firstly, the mathematical model of screw-scanning track for the diamond wheel was established, and the profile data of the diamond wheel were acquired by a displacement sensor. After data filtering and interpolating, the 3D geometric topography of the diamond wheel was established. According to the feature of aspheric parallel grinding, some parameters to criticize the shape accuracy of arc wheel were put forward. By extracting the wheel profile of the axial direction, the arc radius and center coordinates were calculated by least-square circle fitting. And by error segregating, arc error, circular runout error and the deviation of profile center for the diamond wheel were extracted. Finally, an arc diamond wheel in aspheric element processing was measured experimentally. Some key dimensions and errors of the diamond wheel were achieved. The average radius of the wheel is 55.442 3 mm and the fluctuation range of radius is 0.16 mm. The arc error in the girdle of ±8 mm is about 5 μm, the circular runout error is about 2 μm and the relative deviation of profile center is 0.008 mm. By using those measured data, a large scale aspheric optics grinding experiment was performed and results show that the surface errors( P-V and RMS) of the element are about 4.62 μm, and below 0.7 μm, respectively, which satisfies the engineering requirements.

Inspired by the structure and function of spider hair receptors, a simple harmonic vibration sensor with Symmetrical Electrode Metal-core Piezoelectric Fiber (SMPF) was designed and fabricated. The fiber body was prepared by extrusion-stretch method, and the symmetrical conductive adhesive was used as the external electrode in the longitudinal surface. After polarization, the simple harmonic vibration sensor with the SMPF was prepared. Based on the piezoelectric equation and the vibration theory, the theoretical model of harmonic vibration sensor with the SMPF based on a cantilever beam structure was established, and the relationship between the sensor signal and the angle and amplitude of simple harmonic vibration was analyzed. The SMPF was fixed on a substrate, and an experimental system was built. The response of the sensor to simple harmonic vibration was tested and the theoretical model was verified. The results show that the sensor with the SMPF can accurately sense the frequency of harmonic vibration, the sensor signal is linear related to the amplitude of simple harmonic vibration, and has an "8" shape relationship with the direction. Moreover, the resonance frequency of SMPF is 15.6 Hz, and the sensitivity is 0.019 pC/mm. In conclusion, the sensor with the SMPF can measure the frequency, amplitude or the direction of simple harmonic vibration and has prospect for engineering applications.

A portable retroreflection coefficient detector was designed according to relevant national standards to measure the retroreflection coefficients of the traffic signs, vehicle body markings and high visibility warning clothes. The measuring principles of retroreflection coefficients were analyzed and compared, and the retroreflection coefficient detector was developed based on the relative measurement method. White reflecting light was used as the divergent light source of the retroreflection coefficient detector, and it could simulate the actual working condition of retroreflection objectives in a short distance and to complete the measurement of the retroreflection coefficients. The designs of optical system, photoelectric conversion circuit and STM32F103C8T6 single-chip control system in the detector were introduced. A selection model for the test angles of retroreflection coefficients was established based on minimum safety driving distance, and the uncertainty of the retroreflection coefficient detector was evaluated. Finally, a test experiment was performed by using the portable retroreflection coefficient detector. The experiment results show that the maximum value of the indication error is 4.40% in the test range of (0.1-199.9) cd·lx-1·m-2 , and that is 1.31% in the test range greater than 199.9 cd·lx-1·m-2,which meets the requirement of GB 26377-2010 for indication errors. The portable retroreflection coefficient detector has advantages of miniaturization and intellectualization and has practical significance to detect the traffic safety signs and vehicle body signs.

For body inner temperature measurement, especially for tumor hyperthermia temperature real-time monitoring, temperature sensing probes should have smaller volume, good toughness and resistance to electromagnetic interference ability. This paper focuses on a medical small optical fiber grating temperature sensing probe. The glass tube was used to encapsulate short fiber Bragg gratings to allow the probes to effectively avoid the error caused by stress and to eliminate the influence of metal packages on the distribution of electromagnetic field. Meanwhile, the probe and fiber were wrapped in medical polyurethane sleeve to effectively protect the probe and fiber and make them be good toughness. After packaging, the cross-section diameter and the length of the probe are 1 mm and about 4 mm, respectively. The reflection wavelengths of the probe at different temperatures, the response time of the probe at changed temperature and the internal temperature change process of the pork heated by the medical radiofrequency hyperthermia machine were measured experimentally. The results show that the linear correlation coefficient between the reflection wavelength of the probe and the temperature is 0.999 95 in the body temperature range. The temperature sensing accuracy and the maximum response time of the probe is 0.2 ℃ and about 4 s, respectively. Moreover, the probe can be used to monitor the internal temperature change of the pork heated by the medical radiofrequency hyperthermia machine in real-time.

When thermal dilution method and indicator dilution method are used to measure Cerebral Blood Flow （CBF）parameters, it requires catheter insertion and timing blood collection ,which will cause some damage to the human body. To solve their invasive and complex operations, a new noninvasive and rapid method for measuring the CBF was proposed based on Fick's law and Lambert's law. On the basis of Pulse Dye Densitometry/Near Infrared Spectrometry(PDD/NIRS), Indocyanine Green(ICG) was used as an indicator, and the ICG introducing brain and arterial were calculated to obtain the CBF. In order to verify the correctness of the model, an adult rabbit was used as the experimental object. The ICG pigment was injected rapidly in rabbits, at the same time the CBF was measured by PDD-NIRS method and the CBF value was calculated. Experiment shows that the relative error of CBF measured by PDD-NIRS method is 2% to 4%, which verifies the feasibility of the proposed method. The clinical comparison experiments also demonstrate that the average errors meet the clinical diagnosis requirement. This method provides a useful way for clinical diagnosis of cardiovascular and cerebrovascular diseases and clinical cerebral blood flow monitoring.

For error measurement and error compensation of large-scale machine tools in high-end equipment manufacture, a two-dimensional photoelectric level inclination measuring system was established based on the principle of optical auto-collimation and liquid surface reflection to measure the roll angle and the pitch angle of a machine tool. Firstly, a laser diode was used as a source of the system, and the inclination was doubled on the surface of the silicone oil through an optical auto-collimation system. Then, spot position changes were detected by a position sensitive detector, the photoelectric signal containing angle information was output and the four low noise I-V conversion and consistent amplifying circuits were used to amplify signals and to reduce errors. Finally, a high-speed data acquisition system was used to acquire data and to convert them into inclination information by mean filtering, curve fitting and solution processing to accomplish two-dimensional inclination measuriement. A contrast experiment was performed on an optical platform. The results show that the angle errors are less than ±0.050 mm/m (about ±10″) and the linearity exceeds 0.25% within the system measuring range of -10-10 mm/m (about -2 000″-2 000″). It concludes that the system meets the requirements of large range, high precision and high stability and achieves two-dimensional level inclination measurement of large-scale machine tools rapidly.

As the commercial CMOS (Complementary Metal Oxide Semiconductor) transistor model will lose the accuracy in a high frequency range, a nonlinear RCL transmission line model based on classic kinetic theory was developed with ADS software. The accuracy of proposed model and the working principle of the CMOS in THz range were discussed based on measured data. A simulation system for the nonlinear RCL transmission line model was constructed, and simulation results were compared with that of commercial model and the difference between the proposed model and the commercial CMOS model in THz range was analyzed. Then, the frequency responses of current CMOS transistors were tested, tested data were compared with those of the simulation data from the two kinds of models. The results demonstrate that the proposed model has been improved the prediction accuracy. Finally, the effects of channel size of transistor on the scattering effect of carriers were analyzed and conditions of transistor to turn on ballistic mode were given with 3σ rules. The results show that the difference between the two models mainly focuses on the inductance part, which could represent the momentum conservation of carriers in transistor channel and if the scattering effect could be neglected or not. Compared with the commercial model, the prediction accuracy for the optimal resonant frequency of a detector has improved by 0.3%, and that for the optimal working bandwidth of the detector has increased about 10%. This study provides a good foundation for the accurate establishment and simulation analysis of CMOS transistor models.

The academic meanings of infrared imaging fiber bundles were researched and their fabrication technologies were given. A kinds of flexible chalcogenide infrared imaging fiber bundles were fabricated, and their characteristics were tested. By taking As40S58Se2 and As40S60 as the rod and tube materials, the fibers were drawn by rod-in-tube technique. The infrared imaging fiber bundle with a core diameter of 40 μm and a cladding diameter of 50 μm was prepared by man-machine-integration technique and it shows squared arrangement which incorporates 576 individual fibers. A special experimental equipment was constructed. The properties of this imaging fiber bundle including spatial arrangement and shaping, blind-fiber ratio and optical transmission efficiency were measured, and the decrease of Modulation Transfer Function (MTF) in the system caused by infrared imaging fiber bundle were measured. Experimental results indicate that the fiber bundle shows a good spatial arrangement and shaping. The blind-fiber ratio is 2.7%, fiber attenuation loss is lower than 0.5 dB/m, and the optical efficiency is almost 31%. Moreover, The decrease of MTF resulted from the fiber bundle in the system is less than 10%. Finally, an infrared imaging experiment was implemented, and the result shows that fine infrared thermal images have been delivered through this system.

By taking the circumference liquid films of cross-sectional pipe in gas-liquid two-phase annular flow for measuring objectives, a novel visual sensor with virtual two-visual angles was designed and optimized by combining a single high-speed camera and planar reflectors. Based on the virtual binocular stereo vision principle, a measurement model for visual sensor with two-visual angles was established. To maximize the effective measurement angle and to obtain much liquid film flow informations, the model of the virtual double-view vision sensor was analyzed and its structure parameters were optimized by considering the field of view, sensor size, measuring distance and the optical path refraction of the pipe. The theory analyzing and experimental results indicate that the optimized sensor can get a view field closed to 300° effective circumference visual angle, which is far better than that using a single high-speed camera to capture directly. It provides a theoretical basis for the real-time measurement of the gas-liquid two-phase annular flow circumference liquid films through the double-view vision sensor, and has great significance to study the film thickness and analyze the flow state of the annular flow.

To apply augmented reality technology in mobile smart devices, a novel target tracker for the embedded system of a smart mobile device was proposed. In the stage of feature description, the binary feature was segmented rapidly and discriminative binary descriptors were established by fast brightness segment. In the stage of feature matching, a sparse searching template was proposed to improve the execution efficiency of the tracking algorithm. Initial target information was stored in a static library established by the tracker and the change of target appearance was stored in a dynamic library, and the target location was tracked by comparing search information and the templates in libraries. The execution time of the tracker was compared, and the results show that sparse search templates significantly improve the execution time of the algorithm at maintaining a higher tracking accuracy, and setting the search radius to 10 is able to meet the real-time requirements of trackers. The effective capacity of the tracker was compared also. And the results indicate that the tracking error of DBRISK are 16%, 28% and 29% decrease than those of the original BRISK (Binary Robust Invariant Scalable Keypoints) under three different search radii, which means the proposed method significantly improves the accuracy of tracking method, and is applicable to the limited computing power smart mobile devices.

When noisy signals from a Micro-electromechanical System(MEMS) gyro are reconstructed by wavelet decomposes, it is difficult to choose the wavelet coefficients corresponding to the real signals. Therefore, a kind of Layerwise and Adaptive Matching Pursuit-based(LAMP-based)algorithm was proposed to solve the problem mentioned above. A sparse extraction construction of wavelet coefficients from the real MEMS gyro signal was established by recovering the sparsity of the wavelet coefficients of the noisy gyro signal. Then, the new LAMP algorithm was designed to pick out the most sparse wavelet coefficients among all wavelet coefficients of the noisy MEMS gyro signal, and the chosen wavelet coefficients were utilized to reconstruct the real MEMS gyro signal. Substantial experiment results indicate that the proposed LAMP algorithm is superior to other iterative greedy reconstruction algorithms. It effectively removes substantial MEMS gyro noise, and corresponding azimuth average error reduces from 10.060 2 （°）/h (before LAMP reconstruction) to 5.034 6 （°）/h (after LAMP reconstruction), which shows its denoising performance to be better than that of the traditional wavelet threshold reconstruction method with an azimuth average error of 8.596 8 (°)/h(after wavelet threshold reconstruction). It concludes that the proposed LAMP-based signal reconstruction method for MEMS gyro has good application prospect.

To move the outliers and noisy points away from 3D point cloud data and to maintain the sharp features of the model simultaneously, a feature-based weighted fuzzy C-means point cloud denoising algorithm was proposed. Firstly, the point cloud was organized by K-D tree data structure and the large-scale outliers were removed by the statistics of r radius neighboring points. Then, the principal component analysis method was adopted to estimate the curvature and normal vector of point cloud data and the patches with distinguished features were identified according to the curvature feature weight. Pursuant to different feature regions, the feature-preserving weighted fuzzy C-means clustering algorithm was adopted to denoise for the patch with rich feature information and the fuzzy C-means clustering algorithm was adapted to denoise for the patch with less feature information, respectively. Finally, a bilateral filter was used to smooth the data set. The algorithm was verified and the experimental results show that the max denoising error is limited to 0.15% of the model size and the min denoising error is limited to 0.03% of the model size. In conclusion, this approach moves efficiently and precisely the noise with different scales and intensities in point cloud, meanwhile performing a feature-preserving nature. Moreover, it is robust enough to different noise models.

For the non-uniformity of polarizer array caused by the difference of the lithography accuracy and the transmission of each pixel polarizer in a pixel polarized camera, a least squares based super-pixel calibration method with angle constraint was proposed. A mathematical model of calibration optimization algorithm with angle constraint was established, meanwhile, scalar gain and dark compensation parameters were added in the model. Finally, an integrating sphere calibration system by taking a micro-polarizer as the core was established, simulation experiment and imaging experiment were performed. The experimental results show that the proposed method in this paper corrects effectively the amplitude unevenness of the super-pixels while correcting the degree of polarization and non-uniformity as compared with the least squares method, and the accuracy of the reconstruction perspective has increased by 10%. After interpolation processing, the edge performance is more obvious, and the noise generated during the interpolation process effectively is reduced and the image quality is improved.

To evaluate quantitatively the image quality of a spot-detecting camera, a 2D anisotropic Gaussian fitting method was proposed. A spot-detecting camera was used to collect the infinity point target coming from a star simulator, and a certain area of energy distribution was obtained. Based on the correlation of the Gaussian energy distribution and the original distribution, this energy distribution was used in anisotropic Gaussian fitting to solve the parameters such as Gaussian radius and anisotropic factor. Then, the size of 80% of the energy was obtained by numerical integration. The experimental results show that the background threshold and anisotropic factor are optimized automatically and the influence of the noise on test results is reduced since the correlation is introduced. Moreover, the introduction of anisotropic factors, evaluation of pixel-phase error and the effect of optical system aberration on the imaging quality of the camera can be used as the testing condition criterion for defocused spots. The experimental results show that the repeatability of equivalent area circle diameter for the defocused spots is 0.15 pixel under the crisscross-shaped condition and that is 0.19 pixel under the farmland-shaped condition, respectively. The proposed method implements the defocused spot test by spot-detecting cameras, and also controls better imaging quality.