Optics and Precision Engineering, Volume. 25, Issue 12, 3056(2017)
Circular grating filters with multiple resonant peaks
A guided mode resonant Circular Grating Filter (CGF) was proposed to realize its multiple band filter in the visible light regions. The reason for the formation of multiple resonance peaks in the CGF was analyzed theoretically under the polarization of the same incident beam. The freestanding CGFs with the thickness of 70 nm were realized on HfO2-on-silicon by micro/nano machining technology. An 1D linear grating was used to simulate the reflection spectrum of the circular grating. By changing the polarization conditions and the incidence angle of incident beam, the reflection spectrum of CGF was experimentally obtained by using angular resolved micro reflectometry. Experimental results indicate that the CGF forms two resonant speaks (505 nm and 575 nm) in a specific grating period (350 nm) and a duty cycle (0.5) for the surface-normal linearly polarized incident beam. The result is in great agreement with the theoretical simulations. Furthermore, the resonance peaks will shift to longer bands with the increase of the grating period under the same duty cycle. It concludes that the filtering effect of multiple bands can be realized by designing different subwavelength gratings with different structures.
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WANG Yong-jin, QIN Chuan, GAO Xu-min, ZHANG Feng-hua. Circular grating filters with multiple resonant peaks[J]. Optics and Precision Engineering, 2017, 25(12): 3056
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Received: May. 23, 2017
Accepted: --
Published Online: Jan. 10, 2018
The Author Email: Yong-jin WANG (wangyj@njupt.edu.cn)