Infrared and Laser Engineering, Volume. 45, Issue 1, 117006(2016)
Design method of high precision reflection mirror topography measurement structure
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Wang Chengbin, Sun Shengli, Hu Tingliang, Hu Kai. Design method of high precision reflection mirror topography measurement structure[J]. Infrared and Laser Engineering, 2016, 45(1): 117006
Paper Information
Category: 光电测量
Received: May. 9, 2015
Accepted: Jun. 13, 2015
Published Online: Apr. 5, 2016
The Author Email: Chengbin Wang (sitp305@163.com)
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