Study on neural network PID control for micro-displacement stage of Scanning Tunneling Microscope

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Optics and Precision Engineering, Volume. 14, Issue 3, 422(2006)

[in Chinese]1...2, [in Chinese]1, [in Chinese]1, [in Chinese]1 and [in Chinese]1 |Show fewer author(s)

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References(4)

[2] [2] TERSOFF J,HAMANN D R.Theory of scanning tunneling microscopy[J].Phys Rev B,1985,31(1):805-813.

[7] [7] COMINOS P,MUNRO N.PID controllers:recent tuning methods and design to specification[J].IEEPro Control TheoryAppl,2002,149 (1):46-53.

[9] [9] UANG ZY,FEI R,HU ZH Q.A Smith online identification prediction control and its application in STM[C].Proceedings of 4th World Congress on Intelligent Control and Automation,Shanghai,Jun.10-14,2002:2254-2257.

[10] [10] CHEN K S,RUMPER D L,SMITH S T.Design and control for an electromagnetically driven X-Y-θ stage[J].Precision Engineering,2002 (26):355-369.

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on neural network PID control for micro-displacement stage of Scanning Tunneling Microscope[J]. Optics and Precision Engineering, 2006, 14(3): 422

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