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Optics and Precision Engineering, Volume. 14, Issue 3, 422(2006)

Study on neural network PID control for micro-displacement stage of Scanning Tunneling Microscope

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on neural network PID control for micro-displacement stage of Scanning Tunneling Microscope[J]. Optics and Precision Engineering, 2006, 14(3): 422

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    Received: Sep. 2, 2005

    Accepted: --

    Published Online: Feb. 18, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology