Infrared and Laser Engineering, Volume. 51, Issue 12, 20220156(2022)

Research on quantitative detection method of coating thickness on complex substrates

Qiang Zhu1,2, Weihu Zhou1,2, Xiaomei Chen1、*, Guannan Li1, and Junkai Shi1
Author Affiliations
  • 1Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100094, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(9)
    Reflection model under vertical incident of light
    (a) NIR characteristic absorption spectrum of 20-yuan coated and uncoated detected by Near-IR spectroscopy; (b) NIR characteristic absorption spectrum of 10-yuan coated and uncoated detected by Near-IR spectroscopy; (c) NIR characteristic absorption spectrum of 1-yuan coated and uncoated detected by Near-IR spectroscopy
    (a) First-order derivative NIR characteristic absorption spectrum of 20-yuan coated and uncoated; (b) First-order derivative NIR characteristic absorption spectrum of 10-yuan coated and uncoated; (c) First-order derivative NIR characteristic absorption spectrum of 1-yuan coated and uncoated
    In Different wavenumbers, MSC and Second-order derivative NIR characteristic absorbance of 1-yuan Coated and Uncoated
    (a) MSC and Second-order derivative NIR characteristic absorbance of 20-yuan coated and uncoated; (b) MSC and Second-order derivative NIR characteristic absorbance of 10-yuan coated and uncoated; (c) MSC and Second-order derivative NIR characteristic absorbance of 1-yuan coated and uncoated
    • Table 1. Expression of the coated roughness

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      Table 1. Expression of the coated roughness

      Type1-yuan10-yuan20-yuan
      RegionDescriptionSa/μmRegionDescriptionSa/μmRegionDescriptionSa/μm
      Plain-Region 1Coated3.108Plain-Region 1Coated3.439Plain-Region 1Coated2.472
      Plain-Region 23.704Plain-Region 23.809Plain-Region 25.353
      Plain-Region 32.851Plain-Region 33.306Plain-Region 37.192
      Plain-Region 42.036Plain-Region 48.309Plain-Region 45.227
      Complex-Region 514.160Complex-Region 513.460Complex-Region 515.938
      Plain-Region 6Complex Region 613.624Complex -Region 614.232
      Plain-Region 7 Plain-Region 76.690Plain-Region 75.777
      Plain-Region 84.236 Plain-Region 85.039Plain-Region 89.440
    • Table 2. Expression of the coated relative thickness

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      Table 2. Expression of the coated relative thickness

      Type1-yuan10-yuan20-yuan
      RegionDescriptiond1RegionDescriptiond1RegionDescriptiond1
      Plain-Region 1Coated  252.574Plain-Region 1Coated265.339Plain-Region 1Coated241.245
      Plain-Region 2267.249Plain-Region 2273.653Plain-Region 2332.216
      Plain-Region 3248.799Plain-Region 3261.801Plain-Region 3171.205
      Plain-Region 4229.470Plain-Region 4218.388Plain-Region 4321.753
      Complex-Region 5116.244Complex-Region 5102.234Complex-Region 5124.223
      Plain-Region 6Complex-Region 6112.302Complex-Region 6107.153
      Plain-Region 7Plain-Region 7195.219Plain-Region 7223.175
      Plain-Region 8247.899Plain-Region 8239.415Plain-Region 8198.442
    • Table 3. Complex and plain characteristic expression of 20-yuan Coated and Uncoated

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      Table 3. Complex and plain characteristic expression of 20-yuan Coated and Uncoated

      Region20-yuan coated20-yuan uncoated
      Plain-Region 1
      Plain-Region 4
      Complex-Region 5
    • Table 4. Expression of the measurement coated thickness by confocal laser scanning microscopy

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      Table 4. Expression of the measurement coated thickness by confocal laser scanning microscopy

      Type1-yuan10-yuan20-yuan
      RegionD1/μm RegionD1/μm RegionD1/μm
      Plain-Region 16.660Plain-Region 18.001Plain-Region 17.332
      Plain-Region 25.847Plain-Region 29.341Plain-Region 27.267
      Plain-Region 38.783Plain-Region 35.978Plain-Region 312.738
      Plain-Region 410.417Plain-Region 46.750Plain-Region 49.565
      Complex-Region 53.807Complex-Region 54.547Complex-Region 54.015
      Plain-Region 67.006Complex-Region 64.661Complex-Region 66.223
      Plain-Region 79.248Plain-Region 77.321
      Plain-Region 88.779Plain-Region 86.333
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    Qiang Zhu, Weihu Zhou, Xiaomei Chen, Guannan Li, Junkai Shi. Research on quantitative detection method of coating thickness on complex substrates[J]. Infrared and Laser Engineering, 2022, 51(12): 20220156

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    Paper Information

    Category: Photoelectric measurement

    Received: Mar. 9, 2022

    Accepted: May. 17, 2022

    Published Online: Jan. 10, 2023

    The Author Email:

    DOI:10.3788/IRLA20220156

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