[1] [1] XI Z, ZHANG P, NIE W, et al.. A novel MEMS omnidirectional inertial switch with flexible electrodes ［J］. Sensors & Actuators A Physical, 2014, 212(6): 93-101.

[2] [2] CAO Y, XI ZH W, YU P X, et al.. A MEMS inertial switch with a single circular mass for universal sensitivity ［J］. Journal of Micromechanics & Microengineering, 2015, 25(10).

[3] [3] CURRANO L J, BECKER C R, LUNKING D, et al.. Triaxial inertial switch with multiple thresholds and resistive ladder readout ［J］. Sensors & Actuators A Physical, 2013, 195(2): 191-197.

[4] [4] KIM H, JANG Y H, KIM Y K, et al.. MEMS acceleration switch with bi-directionally tunable threshold ［J］. Sensors & Actuators A Physical, 2014, 208(2): 120-129.

[5] [5] MA C W, HUANG P C, KUO J C, et al.. A novel inertial switch with an adjustable acceleration threshold using an MEMS digital-to-analog converter ［J］. Microelectronic Engineering, 2013, 110(20): 374-380.

[6] [6] HUANG X L, XIONG Y, CHEN G Y, et al.. Fabrication of micro spiral acceleration switch using UV-LIGA technology ［J］. Opt. Precision Eng., 2010, 18(5): 1152-1158. (in Chinese)

[7] [7] CHEN W, YANG Z, WANG Y, et al.. Influence of applied acceleration loads on contact time and threshold in an inertial microswitch with flexible contact-enhanced structure ［J］. Sensors & Actuators A Physical, 2014, 216(3): 7-18.

[8] [8] WANG Y, YANG Z, XU Q, et al.. Design, simulation and characterization of a MEMS inertial switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time ［J］. Journal of Micromechanics & Microengineering, 2015, 25(8).

[9] [9] CURRANO L J, YU M, BALACHANDRAN B. Latching in a MEMS shock sensor: Modeling and experiments ［J］. Sensors & Actuators A Physical, 2010, 159(1): 41-50.

[10] [10] GUO Z Y, ZHAO Q C, LIN L T, et al.. An acceleration switch with a robust latching mechanism and cylindrical contacts ［J］. Journal of Micromechanics & Microengineering, 2010, 20(5).

[11] [11] TSAI T Y, YEH C L, LAI Y S, et al.. Response spectra analysis for undamped structural systems subjected to half-sine impact acceleration pulses ［J］. Microelectronics Reliability, 2007, 47(8): 1239-1245.

[12] [12] GILARDI G, SHARF I. Literature survey of contact dynamics modelling ［J］.Mechanism & Machine Theory, 2002, 37(10): 1213-1239.

[13] [13] HEMKER K J, LAST H. Microsample tensile testing of LIGA nickel for MEMS applications ［J］. Materials Science and Engineering: A, 2001, 319: 882-886.