Acta Optica Sinica, Volume. 14, Issue 7, 783(1994)
Fabrication of SOI Single-Mode Rib Wavegulde with Large Trapezoidal Cross-Section
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[in Chinese], [in Chinese], [in Chinese]. Fabrication of SOI Single-Mode Rib Wavegulde with Large Trapezoidal Cross-Section[J]. Acta Optica Sinica, 1994, 14(7): 783