Acta Optica Sinica, Volume. 14, Issue 7, 783(1994)
Fabrication of SOI Single-Mode Rib Wavegulde with Large Trapezoidal Cross-Section
A SOI (silicon-on- insulator ) single- mode rib waveguide with large trapezoidal cross-section formed by SDB (silicon wafers direct bonding) process has been fabricated. And the SDB SOI rib waveguide losses are below 0.85 dB/cm by measurements at a wavelength of 1.3 μm.
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[in Chinese], [in Chinese], [in Chinese]. Fabrication of SOI Single-Mode Rib Wavegulde with Large Trapezoidal Cross-Section[J]. Acta Optica Sinica, 1994, 14(7): 783
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