Research on the Optic-fiber Sensor Suitable for Deflection Measurement of Silicon Micromechanical Resonators

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Photonica Sinica, Volume. 32, Issue 10, 1216(2003)

[in Chinese]1...2, [in Chinese]1, [in Chinese]3 and [in Chinese]2 |Show fewer author(s)

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¹[in Chinese]

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References(5)

[1] [1] Armand N,Nortel N,Santa C.MEMS devices for all optical networks.Proceedings of SPIE,2001,4561:1～10

[2] [2] Culshaw B.Fiber optic sensor:integration with micromachined devices.Sensors and Actuates,1995,A47(2):463～469

[3] [3] Hiroyuki F.MEMS/MOEMS application to optical communication.Proceedings of SPIE,2001,4561:xix～xxv

[6] [6] Yuan L, Qin A. Fiber optic diaphram pressure sensor with automatic intensity compensation. Sensors and Actuators, 1991,A28(1): 29～33

[8] [8] Lammerink T S J, Elwenspoek M, Fluitman J H J. Frequency dependence of thermal excitation of micromechanical resonators. Sensors and Actuators,1991,A27(1/3):685～689

CLP Journals

[1] [in Chinese], [in Chinese], [in Chinese], "Study on silicon micro-resonators by using a novel optical excitation and detection apparatus," Chin. Opt. Lett. 4, 309 (2006)

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on the Optic-fiber Sensor Suitable for Deflection Measurement of Silicon Micromechanical Resonators[J]. Acta Photonica Sinica, 2003, 32(10): 1216

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