Acta Photonica Sinica, Volume. 32, Issue 10, 1216(2003)
Research on the Optic-fiber Sensor Suitable for Deflection Measurement of Silicon Micromechanical Resonators
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on the Optic-fiber Sensor Suitable for Deflection Measurement of Silicon Micromechanical Resonators[J]. Acta Photonica Sinica, 2003, 32(10): 1216