Chinese Optics Letters, Volume. 2, Issue 8, 08489(2004)

An in situ growth method for property control of LPCVD polysilicon film

Hongbin Yu, Haiqinq Chen, Jun Li, and Chao Wang
Author Affiliations
  • Department of Optoelectronics Engineering, Huazhong University of Science and Technology, Wuhan 430074
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    Hongbin Yu, Haiqinq Chen, Jun Li, Chao Wang. An in situ growth method for property control of LPCVD polysilicon film[J]. Chinese Optics Letters, 2004, 2(8): 08489

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    Paper Information

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    Received: Jun. 7, 2004

    Accepted: --

    Published Online: Jun. 6, 2006

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