[1] [1] GR?FE D, WICKBERG A, ZIEGER M M, et al. Adding chemically selective subtraction to multi-material 3D additive manufacturing［J］. Nature Communications, 2018, 9(1): 2788-2793.

[2] [2] DIETRICH P I, BLAICHER M, RE-UTER I, et al. In-situ 3D nano-prin-ting of free-form coupling elements for hybrid photonic integration［J］. Nature Photonics, 2018, 12(4): 241-247.

[3] [3] GISSIBL T, THIELE S, HERKOMM- ER A, et al. Two-photon direct laser writing of ultracompact multi-lens objectives［J］. Nature Photonics, 2016, 10(8): 554-560.

[4] [4] SANG W L, PARK S J, CAMPBELL E E B, et al.A fast and low-power microelectromechanical system-based non-volatile memory device［J］.Nature Communications, 2011, 2(1): 220.

[5] [5] BHASKAR U K, BANERJEE N, AB- DO LLAHI A, et al. A flexoelectric microelectromechanical system on si-licon［J］. Nature Nanotechnology, 2015, 11(3): 263-266.

[6] [6] KHUDIYEV T, CLAYTON J, LEVY E, et al. Electrostrictive microelectromechanical fibres and textiles［J］. Nature Communications, 2017, 8(1): 1435-1449.