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Acta Optica Sinica, Volume. 31, Issue s1, 100513(2011)

Ultra-precision Alignment System Based on Diffracting Moiré Signals

Zhang Jinlong1、*, Xu Hui1, Liu Jingnan2, and Gong Shanshan3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Zhang Jinlong, Xu Hui, Liu Jingnan, Gong Shanshan. Ultra-precision Alignment System Based on Diffracting Moiré Signals[J]. Acta Optica Sinica, 2011, 31(s1): 100513

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    Paper Information

    Category: OPTOELECTRONICS

    Received: Mar. 1, 2011

    Accepted: --

    Published Online: Jun. 23, 2011

    The Author Email: Jinlong Zhang (ZJL0310@163.com)

    DOI:10.3788/aos201131.s100513

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology