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Optics and Precision Engineering, Volume. 14, Issue 3, 428(2006)

Design and analysis of 1-DOF nano- positioning stage

[in Chinese]1,2 and [in Chinese]1
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  • 2[in Chinese]
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    [3] [3] SCHMIT J,OLSZAK A.High-precision shape measurement by white-light interferometry with real-time scanner error correction[J].Appl.Opt.,2002,41:5943-5950.

    [7] [7] ELMUSTAFA A A,LAGALLY M G.Flexural hinge guided motion nanopositioner stage for precision machine:finite element simulations[J].Precision Engineering,2001(25):77-81.

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    [in Chinese], [in Chinese]. Design and analysis of 1-DOF nano- positioning stage[J]. Optics and Precision Engineering, 2006, 14(3): 428

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    Paper Information

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    Received: Jul. 14, 2005

    Accepted: --

    Published Online: Feb. 18, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology