Design and analysis of 1-DOF nano- positioning stage

Optics and Precision Engineering, Volume. 14, Issue 3, 428(2006)

[in Chinese]^1,2 and [in Chinese]¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

Tools

Get Citation

Copy Citation Text

[in Chinese], [in Chinese]. Design and analysis of 1-DOF nano- positioning stage[J]. Optics and Precision Engineering, 2006, 14(3): 428

Download Citation

Paper Information

Category:

Received: Jul. 14, 2005

Accepted: --

Published Online: Feb. 18, 2008

The Author Email:

DOI:

Topics