Optical Communication Technology, Volume. 46, Issue 4, 68(2022)
Design and fabrication of the SiN grating coupler with low loss
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LIANG Yuxin, LI Zhihui, FAN Shijia, YANG Zhonghua, LIU Dapeng, FENG Jing, LIAO Haijun, CUI Naidi. Design and fabrication of the SiN grating coupler with low loss[J]. Optical Communication Technology, 2022, 46(4): 68
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Received: May. 10, 2022
Accepted: --
Published Online: Oct. 16, 2022
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