Researching | Researching status and developing tendency of microaccelerometer

Optics and Precision Engineering, Volume. 12, Issue z1, 81(2004)

Researching status and developing tendency of microaccelerometer

[in Chinese]1...2, [in Chinese]1, [in Chinese]1, [in Chinese]1,3 and [in Chinese]1 |Show fewer author(s)

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[6] [6] MUKHERJEE T. System-Level modeling and design of integrated mems[R] ,http:∥www. ece. cmu. edu/～mems.

CLP Journals

[1] Shuai HAN, Xinjie ZHANG, Qiao GU, Yao LIU, Xinyi WANG. Inertial focusing effect of particles in spiral microchannel with asymmetric cross-section[J]. Optics and Precision Engineering, 2022, 30(3): 310

[2] [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of micro spiral acceleration switch using UV-LIGA technology[J]. Optics and Precision Engineering, 2010, 18(5): 1152

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Researching status and developing tendency of microaccelerometer[J]. Optics and Precision Engineering, 2004, 12(z1): 81

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Received: Mar. 22, 2004

Accepted: --

Published Online: Nov. 3, 2006

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Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology