Acta Photonica Sinica, Volume. 50, Issue 11, 1112006(2021)

Large Dynamic Range Scatter Signal Acquisition Based on Multi-exposure Image Fusion

Chen WEI1... Hongjun WANG1,*, Dasen WANG2, Ailing TIAN1, Bingcai LIU1, Xueliang ZHU1 and Weiguo LIU1 |Show fewer author(s)
Author Affiliations
  • 1Shaanxi Province Key Laboratory of Membrane Technology and Optical Test,Xi'an Technological University,Xi'an 710021,China
  • 2The Ningbo Branch of Ordnance Science Institute of China,Ningbo,Zhejiang 310022,China
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    Figures & Tables(13)
    Schematic diagram of optical element surface scattering image acquisition device
    Scattering distribution diagram of the same position of the optical element under different exposure times
    Multi-exposure scattering image fusion flowchart
    Flow chart of fusion of low-frequency components with the strongest principle of scattered signal
    Scattering distribution map with large dynamic range
    Coordinate relation diagram of bidirectional scattering distribution function
    Distribution of relative scattered light power at different exposure times
    Fusion results of different fusion methods
    Relative scattered light power distribution map obtained by different fusion methods
    • Table 1. Evaluation results of original scattering images with different exposure time

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      Table 1. Evaluation results of original scattering images with different exposure time

      Evaluation indexDifferent exposure time
      100 μs800 μs6 449 μs51 980 μs419 000 μs
      EN0.083 50.082 20.040 10.001 90.000 1
      AG0.847 94.842 518.904 622.018 519.918 9
      VAR142.073 8540.330 42 181.358 12 743.789 41 935.880 1
    • Table 2. Evaluation results of scattering images fused by different methods

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      Table 2. Evaluation results of scattering images fused by different methods

      Evaluation indexDifferent fusion methods
      Weighted averageLaplace transformProposed method
      EN0.692 40.572 20.698 1
      AG11.775 412.513125.504 1
      VAR948.042 01 393.028 62 639.147 4
    • Table 3. The surface roughness calculation results of each exposure scattering image

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      Table 3. The surface roughness calculation results of each exposure scattering image

      Exposure time100 μs800 μs6 449 μs51 980 μs419 000 μsWhite light interferometry
      Surface roughness/nm6.414.183.872.111.732.85
    • Table 4. Surface roughness calculation results of different fusion algorithms

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      Table 4. Surface roughness calculation results of different fusion algorithms

      Fusion methodsWeighted averageLaplace transformProposed method of this paper

      White light

      interferometry

      Surface roughness/nm6.397.793.152.85
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    Chen WEI, Hongjun WANG, Dasen WANG, Ailing TIAN, Bingcai LIU, Xueliang ZHU, Weiguo LIU. Large Dynamic Range Scatter Signal Acquisition Based on Multi-exposure Image Fusion[J]. Acta Photonica Sinica, 2021, 50(11): 1112006

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 6, 2021

    Accepted: Jul. 1, 2021

    Published Online: Dec. 2, 2021

    The Author Email: WANG Hongjun (whj0253@sina.com)

    DOI:10.3788/gzxb20215011.1112006

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