Fig. 1. System of wavefront measurement

Fig. 2. Layout of optical system

Fig. 3. Layout of system optical path diagram

Fig. 4. Flow chart of integrated optical-mechanical-thermal analysis

Fig. 5. Displacement distribution of system

Fig. 6. Wavefront aberration at different temperatures

Fig. 7. Curve of system aberration RMS with temperature

Fig. 8. Picture of wavefront measurement system

Fig. 9. Curve of system aberration RMS with time

Fig. 10. Wavefront maps at different wavelengths