[1] [1] ZHOU J B, MENG G, ZHANG W M. Characteristics of micro gas journal bearing［J］. Journal of Vibration & Shock, 2007, 26(9): 30-33. (in Chinese)

[2] [2] CHEN Q,CHEN B,CAI L M. Effect of equalizing groove on small vibration of aerostatic bearings［J］. Optics and Precision Engineering,2014,22(12): 3354-3359.(in Chinese)

[3] [3] RAPARELLI T, VIKTOROV V, COLOMBO F, et al.. Aerostatic thrust bearings active compensation: Critical review［J］. Precision Engineering, 2016, 44: 1-12.

[4] [4] XIA Y M, YANG T R, ZHANG G Q, et al.. Flow field distribution and bearing characteristics of hydrostatic thrust bearing in Nanosys-1000 machine［J］. Optics and Precision Engineering, 2013, 21(1): 144-150. (in Chinese)

[5] [5] GAO S, CHENG K, CHEN S, et al.. CFD based investigation on influence of orifice chamber shapes for the design of aerostatic thrust bearings at ultra-high speed spindles［J］. Tribology International, 2015, 92: 211-221.

[6] [6] LI Y, YIN Y, YANG H, et al.. Modeling for optimization of circular flat pad aerostatic bearing with a single central orifice-type restrictor based on CFD simulation［J］. Tribology International, 2017, 109: 206-216.

[7] [7] NISHIO U, SOMAYA K, YOSHIMOTO S. Numerical calculation and experimental verification of static and dynamic characteristics of aerostatic thrust bearings with small feedholes［J］. Tribology International, 2011, 44(12): 1790-1795.

[8] [8] LI Y F, YIN Y H. Numerical modeling of mechanical performances of aerostatic bearing with orifice-type restrictor［J］. Optics and Precision Engineering, 2017, 25(2): 417-424. (in Chinese)

[9] [9] BELFORTE G,RAPARELLI T, VIKTOROV V. Discharge coefficients of orifice-type restrictor for aerostatic bearings［J］.Tribology International, 2007,40(3): 512-521.

[10] [10] CUI H L, YUE X B, ZHANG L X, et al.. Static and dynamic characteristics of aerostatic bearing based on numerical simulation［J］. Journal of Mechanical Engineering, 2016,52(9): 116-121. (in Chinese)

[11] [11] FENG K, ZHANG J, WANG F Y. Influence of radial clearance and processing technology on structural properties of gas foil bearing［J］. Journal of Aeronautical Power, 2016, 31(11): 2773-2780. (in Chinese)

[12] [12] ZHAO X L, ZHANG J A, DONG H, et al.. Numerical simulation and experimental study on the gas-solid coupling of the aerostatic thrust bearing with elastic equalizing pressure groove［J］. Shock and Vibration,2017: 1-11.

[13] [13] CHEN Y S, CHIU C C, CHENG Y D. Influences of operational conditions and geometric parameters on the stiffness of aerostatic journal bearings［J］. Precision Engineering, 2010, 34(4): 722-734.

[14] [14] ZHAO X L, DONG H, FANG ZH, et al.. Research on orifice exit flow field characteristics of aerostatic bearings with small hole throttle［J］. Lubrication Engineering, 2016, 41(12): 37-40. (in Chinese)

[15] [15] NAGHDI P M. The theory of shells and plates［J］. Mechanics of Solids,1973: 425-640.