Journal of Inorganic Materials, Volume. 34, Issue 7, 734(2019)

Improvement on Size Uniformity of SiO2 Nanospheres Applied in Si Optical Resonance Nanopillar-arrays

Xin-Cun PENG1...2, Zhi-Dong WANG1, Meng-Si ZENG1, Yun LIU1, Ji-Jun ZOU1,*, Zhi-Fu ZHU1 and Wen-Juan DENG1 |Show fewer author(s)
Author Affiliations
  • 1Engineering Research Center of New Energy Technology of Jiangxi Province, East China University of Technology, Nanchang 330013, China
  • 2Engineering Research Center of Nuclear Technology Application, Ministry of Education, East China University of Technology Nanchang 330013, China
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    Figures & Tables(6)
    Fabrication process of Si nanopillar-arrays by self- assembled nanosphere etching
    Fabrication process of the monodisperse SiO2 nanospheres by two-step Stober method
    (a) Effect of ammonia amount on particle size distribution of nanospheres; (b) Effect of TEOS amount on particle size distribution of nanospheres; (c) Fusion of the nanospheres found in the SEM image; (d) Particle size distribution of the SiO2 nanosphere seed solution under the optimized synthesis condition
    Effect of the last-step reaction time of the two-step Stober method on uniformity of SiO2 nanospheres: (a) 1 h, (b) 2 h, (c) 3 h, (d) 4 h, (e) 5 h ; (f) Dependence of the average particle size and its distribution on reaction time; (g) SEM image of the SiO2 nanospheres with reaction time of 4 h
    (a) SEM image of the single-layer SiO2 nanosphere on Si substrate (top view) and SEM images of the Si nanopillar-arrays from (b) top view and (c) side view
    (a) Measured area for the light reflectance spectrum and (b) surface reflectance spectra of Si nanopillar-array samples
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    Xin-Cun PENG, Zhi-Dong WANG, Meng-Si ZENG, Yun LIU, Ji-Jun ZOU, Zhi-Fu ZHU, Wen-Juan DENG. Improvement on Size Uniformity of SiO2 Nanospheres Applied in Si Optical Resonance Nanopillar-arrays[J]. Journal of Inorganic Materials, 2019, 34(7): 734

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    Paper Information

    Category: RESEARCH PAPER

    Received: Sep. 18, 2018

    Accepted: --

    Published Online: Sep. 26, 2021

    The Author Email: ZOU Ji-Jun (jjzou@ecit.cn)

    DOI:10.15541/jim20180440

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