Interferometric Measurement of Optical Aspheric Surface Form Error and Parameter Error

Qun Hao; Yiming Liu; Yao Hu; Yan Ning; Zichen Wang; Chuheng Xu; Xinyu Dong; Yuanheng Liu

doi:10.3788/AOS230962

Acta Optica Sinica, Volume. 43, Issue 15, 1522003(2023)

Interferometric Measurement of Optical Aspheric Surface Form Error and Parameter Error

Qun Hao^*, Yiming Liu, Yao Hu^**, Yan Ning, Zichen Wang, Chuheng Xu, Xinyu Dong, and Yuanheng Liu

Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China

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Figures & Tables(10)

Fig. 1. Lightpath of Fizeau interferometer utilizing a CGH^[17]

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Fig. 2. Principle diagram of tilted-wave interferometer^[28]

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Fig. 3. Principle of partial compensation method^[35]

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Fig. 4. Principle of digital Moiré interferometric system

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Fig. 5. Real interferometer lightpath and constructed virtual interferometer in different systems

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Fig. 6. Null interferometric measurement of a quadratic aspheric surface parameters with a laser tracker^[52]

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Fig. 7. Measurement of curvature radius of vertex based on partial compensation interferometry^[53]

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Fig. 8. Principle diagram of aspheric parameter error measurement based on aberration analysis of optimal compensation position

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Table 1. Comparison of interferometric methods for aspheric surface form measurement

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Table 1. Comparison of interferometric methods for aspheric surface form measurement

Method	Type	Advantage	Disadvantage	Convex	Concave
Null test	No-aberration point	High accuracy	Only for quadratic surface	○	○
	Compensator	High accuracy	Low versatility Limited compensating ability	○	○
	CGH	High accuracy	Low versatility High cost	○	○
Non-null test	Sub-aperture stitching interferometry	High versatility	Time-consuming	○	○
	Sub-Nyquist interferometry	High versatility	Require prior knowledge	○	○
	Two wavelength phase shifting interferometry	High versatility	Chromatism	○	○
	Shearing interferometry	High versatility	Information loss Complex algorithm	○	○
	Tilted-wave interferometry	High versatility Efficient	Retrace error	○	○
	Point diffraction interferometry	High accuracy	Time-consuming	×	○
	Partial compensation interferometry	High versatility Low cost	Require distance measurement	○	○

Table 2. Comparison of interferometric methods for aspheric surface parameter measurement
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Table 2. Comparison of interferometric methods for aspheric surface parameter measurement
Method Type R K A₂_i Convex Concave
Null interferometry ○ ○ × × ○
Non-null interferometry Axial moving ○ × × × ○
Best compensation position ○ ○ ○ ○ ○

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Qun Hao, Yiming Liu, Yao Hu, Yan Ning, Zichen Wang, Chuheng Xu, Xinyu Dong, Yuanheng Liu. Interferometric Measurement of Optical Aspheric Surface Form Error and Parameter Error[J]. Acta Optica Sinica, 2023, 43(15): 1522003

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Paper Information

Category: Optical Design and Fabrication

Received: May. 10, 2023

Accepted: Jun. 25, 2023

Published Online: Aug. 3, 2023

The Author Email: Hao Qun (qhao@bit.edu.cn), Hu Yao (huy08@bit.edu.cn)

DOI:10.3788/AOS230962

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Comparison of interferometric methods for aspheric surface form measurement

Table 1. Comparison of interferometric methods for aspheric surface form measurement

Table 2. Comparison of interferometric methods for aspheric surface parameter measurement

Table 2. Comparison of interferometric methods for aspheric surface parameter measurement