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Optics and Precision Engineering, Volume. 16, Issue 7, 1218(2008)

Speed test and control for ultrasonic motor working in vacuum

LU Dan*, ZHENG Wei, and ZHAO Chun-Sheng
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    [5] [5] MORITA T,NIINO T,ASAMA H.Rotational feedthrough using ultrasonic motor for high vacuum condition[J].Vacuum,2002,65:85-90

    [6] [6] MORITA T,TAKAHASHI S,ASAMA H,et al..Rotational feedthrough using an ultrasonic motor and its performance in ultra high vacuum conditions[J].Vacuum,2003,70:53-57

    CLP Journals

    [1] LI Chao-dong, HE Xiao-jing. Miniaturization of board-type horizontal linear ultrasonic motor[J]. Optics and Precision Engineering, 2010, 18(4): 887

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    LU Dan, ZHENG Wei, ZHAO Chun-Sheng. Speed test and control for ultrasonic motor working in vacuum[J]. Optics and Precision Engineering, 2008, 16(7): 1218

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    Paper Information

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    Received: Oct. 16, 2007

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: LU Dan (ld197832@163.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology